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Method for high phase accuracy trimming of MZIs via Ge ion implantation and electrical annealing

Method for high phase accuracy trimming of MZIs via Ge ion implantation and electrical annealing
Method for high phase accuracy trimming of MZIs via Ge ion implantation and electrical annealing
Logan, April
e8358307-2b35-4326-bc11-3800a5b82a28
Chen, Xia
64f6ab92-ca11-4489-8c03-52bc986209ae
Yu, Xingshi
a368e8ff-5e3d-4538-8166-aa0011812bd0
Shen, Weihong
2facca30-447b-4303-9e4c-5f19abf1e3d7
Yan, Xingzhao
e1f3f636-74e4-42d5-81c7-04feec2b85ba
Zhang, Weiwei
1a783f97-c5ac-49e9-a5a0-49b8b2efab36
Машановић, Горан
c806e262-af80-4836-b96f-319425060051
Reed, Graham
ca08dd60-c072-4d7d-b254-75714d570139
Thomson, David
17c1626c-2422-42c6-98e0-586ae220bcda
Logan, April
e8358307-2b35-4326-bc11-3800a5b82a28
Chen, Xia
64f6ab92-ca11-4489-8c03-52bc986209ae
Yu, Xingshi
a368e8ff-5e3d-4538-8166-aa0011812bd0
Shen, Weihong
2facca30-447b-4303-9e4c-5f19abf1e3d7
Yan, Xingzhao
e1f3f636-74e4-42d5-81c7-04feec2b85ba
Zhang, Weiwei
1a783f97-c5ac-49e9-a5a0-49b8b2efab36
Машановић, Горан
c806e262-af80-4836-b96f-319425060051
Reed, Graham
ca08dd60-c072-4d7d-b254-75714d570139
Thomson, David
17c1626c-2422-42c6-98e0-586ae220bcda

Logan, April, Chen, Xia, Yu, Xingshi, Shen, Weihong, Yan, Xingzhao, Zhang, Weiwei, Машановић, Горан, Reed, Graham and Thomson, David (2025) Method for high phase accuracy trimming of MZIs via Ge ion implantation and electrical annealing. 51st International Micro and Nano Engineering Conference, National Oceanography Centre, Southampton, United Kingdom. 15 - 18 Sep 2025.

Record type: Conference or Workshop Item (Poster)
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AML_MNE_Conference_Abstract - Version of Record
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Published date: 15 September 2025
Venue - Dates: 51st International Micro and Nano Engineering Conference, National Oceanography Centre, Southampton, United Kingdom, 2025-09-15 - 2025-09-18
Learn more about the Zepler Institute for Photonics and Nanoelectronics

Identifiers

Local EPrints ID: 509164
URI: http://eprints.soton.ac.uk/id/eprint/509164
PURE UUID: 6671d23a-9993-415b-920c-fbdf68da3834
ORCID for April Logan: ORCID iD orcid.org/0000-0002-5759-3965
ORCID for Xia Chen: ORCID iD orcid.org/0000-0002-0994-5401
ORCID for Горан Машановић: ORCID iD orcid.org/0000-0003-2954-5138
ORCID for Graham Reed: ORCID iD orcid.org/0009-0002-5314-6604

Catalogue record

Date deposited: 11 Feb 2026 18:07
Last modified: 12 Feb 2026 05:02

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Contributors

Author: April Logan ORCID iD
Author: Xia Chen ORCID iD
Author: Xingshi Yu
Author: Weihong Shen
Author: Xingzhao Yan
Author: Weiwei Zhang
Author: Горан Машановић ORCID iD
Author: Graham Reed ORCID iD
Author: David Thomson

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