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Intelligent nanofabrication for nanophotonics: quantifying and understanding process variability

Intelligent nanofabrication for nanophotonics: quantifying and understanding process variability
Intelligent nanofabrication for nanophotonics: quantifying and understanding process variability
Zhang, Wenhan
e0006103-3ee0-4ce3-a6d3-0cf514bc6c6d
Mills, Ben
05f1886e-96ef-420f-b856-4115f4ab36d0
MacDonald, Kevin F.
76c84116-aad1-4973-b917-7ca63935dba5
Zhang, Wenhan
e0006103-3ee0-4ce3-a6d3-0cf514bc6c6d
Mills, Ben
05f1886e-96ef-420f-b856-4115f4ab36d0
MacDonald, Kevin F.
76c84116-aad1-4973-b917-7ca63935dba5

Zhang, Wenhan, Mills, Ben and MacDonald, Kevin F. (2026) Intelligent nanofabrication for nanophotonics: quantifying and understanding process variability. 16th International Conference on Metamaterials, Photonic Crystals and Plasmonics, , Dublin, Ireland. 14 - 17 Jul 2026. 1 pp .

Record type: Conference or Workshop Item (Paper)
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intelligent nanofab - Author's Original
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Published date: 14 July 2026
Venue - Dates: 16th International Conference on Metamaterials, Photonic Crystals and Plasmonics, , Dublin, Ireland, 2026-07-14 - 2026-07-17

Identifiers

Local EPrints ID: 510133
URI: http://eprints.soton.ac.uk/id/eprint/510133
PURE UUID: 3e686330-6765-4a60-8cbb-f7521e1bb1ff
ORCID for Ben Mills: ORCID iD orcid.org/0000-0002-1784-1012
ORCID for Kevin F. MacDonald: ORCID iD orcid.org/0000-0002-3877-2976

Catalogue record

Date deposited: 18 Mar 2026 17:35
Last modified: 19 Mar 2026 02:41

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Contributors

Author: Wenhan Zhang
Author: Ben Mills ORCID iD
Author: Kevin F. MacDonald ORCID iD

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