Intelligent nanofabrication for nanophotonics: quantifying and understanding process variability
Intelligent nanofabrication for nanophotonics: quantifying and understanding process variability
Zhang, Wenhan
e0006103-3ee0-4ce3-a6d3-0cf514bc6c6d
Mills, Ben
05f1886e-96ef-420f-b856-4115f4ab36d0
MacDonald, Kevin F.
76c84116-aad1-4973-b917-7ca63935dba5
14 July 2026
Zhang, Wenhan
e0006103-3ee0-4ce3-a6d3-0cf514bc6c6d
Mills, Ben
05f1886e-96ef-420f-b856-4115f4ab36d0
MacDonald, Kevin F.
76c84116-aad1-4973-b917-7ca63935dba5
Zhang, Wenhan, Mills, Ben and MacDonald, Kevin F.
(2026)
Intelligent nanofabrication for nanophotonics: quantifying and understanding process variability.
16th International Conference on Metamaterials, Photonic Crystals and Plasmonics, , Dublin, Ireland.
14 - 17 Jul 2026.
1 pp
.
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Conference or Workshop Item
(Paper)
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intelligent nanofab
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Published date: 14 July 2026
Venue - Dates:
16th International Conference on Metamaterials, Photonic Crystals and Plasmonics, , Dublin, Ireland, 2026-07-14 - 2026-07-17
Identifiers
Local EPrints ID: 510133
URI: http://eprints.soton.ac.uk/id/eprint/510133
PURE UUID: 3e686330-6765-4a60-8cbb-f7521e1bb1ff
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Date deposited: 18 Mar 2026 17:35
Last modified: 19 Mar 2026 02:41
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Contributors
Author:
Wenhan Zhang
Author:
Ben Mills
Author:
Kevin F. MacDonald
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