Wafer scale mechanical micro-machining of integrated optics in vacuum cells for quantum technologies
Wafer scale mechanical micro-machining of integrated optics in vacuum cells for quantum technologies
We present high precision mechanical machining techniques which underpin developments in compact atom traps (5-25 mm width \(\geq\) 6 mm wafer thickness) with integrated optical surfaces. Axial oscillation and 3D cross-feed grinding are proposed for generating optical surface quality with less than 20 nm Sa roughness. Abrasive waterjet is proposed for high throughput processing of lower tolerance surfaces. Our processes enable 3D optical access through transparent side walls or by mirrors, which can be arbitrarily orientated.
Keen, Joel
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Gow, Paul C.
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Churchill, Glenn
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Gawith, Corin
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Gates, James
b71e31a1-8caa-477e-8556-b64f6cae0dc2
4 March 2026
Keen, Joel
8303157c-da0d-451d-8d97-a93b483d0283
Gow, Paul C.
193394b1-fe2d-41de-a9aa-6de7e5925b18
Churchill, Glenn
5933a331-fba3-444b-8352-273112c3d6a6
Gawith, Corin
926665c0-84c7-4a1d-ae19-ee6d7d14c43e
Gates, James
b71e31a1-8caa-477e-8556-b64f6cae0dc2
Keen, Joel, Gow, Paul C., Churchill, Glenn, Gawith, Corin and Gates, James
(2026)
Wafer scale mechanical micro-machining of integrated optics in vacuum cells for quantum technologies.
SPIE Photonics West, , San Francisco, United States.
17 - 22 Jan 2026.
(doi:10.1117/12.3076076).
Record type:
Conference or Workshop Item
(Paper)
Abstract
We present high precision mechanical machining techniques which underpin developments in compact atom traps (5-25 mm width \(\geq\) 6 mm wafer thickness) with integrated optical surfaces. Axial oscillation and 3D cross-feed grinding are proposed for generating optical surface quality with less than 20 nm Sa roughness. Abrasive waterjet is proposed for high throughput processing of lower tolerance surfaces. Our processes enable 3D optical access through transparent side walls or by mirrors, which can be arbitrarily orientated.
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Accepted/In Press date: 21 January 2026
Published date: 4 March 2026
Venue - Dates:
SPIE Photonics West, , San Francisco, United States, 2026-01-17 - 2026-01-22
Identifiers
Local EPrints ID: 511308
URI: http://eprints.soton.ac.uk/id/eprint/511308
PURE UUID: 54aa426d-edb8-46e4-a6a6-d2f5bffcdddd
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Date deposited: 11 May 2026 16:51
Last modified: 12 May 2026 02:15
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Contributors
Author:
Joel Keen
Author:
Paul C. Gow
Author:
Glenn Churchill
Author:
Corin Gawith
Author:
James Gates
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