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Flexible coherent diffraction lithography by tunable phase arrays in lithium niobate crystals

Flexible coherent diffraction lithography by tunable phase arrays in lithium niobate crystals
Flexible coherent diffraction lithography by tunable phase arrays in lithium niobate crystals
Flexible coherent diffraction lithography is proposed and preliminarily tested by means of an optical phase mask. The phase mask consisted of a two-dimensional hexagonal lattice of reversed ferroelectric domains engineered in a z-cut lithium niobate substrate and was electro-optically tunable. Appropriate phase shift values across adjacent reversed domains were induced by the application of an external electric field along the z-axis of the crystal via transparent electrodes. Photolithographic exposures of the self-imaging near-field diffraction intensity patterns, at various planes corresponding to the Talbot distances, were performed by using different values of the driving electric field signal.
0030-4018
1950-1953
Paturzo, M.
16617f28-ca22-41d6-b3f5-41d200d78748
Grilli, S.
4e81916a-630b-4178-9a53-d6cc6b20c490
Mailis, S.
233e0768-3f8d-430e-8fdf-92e6f4f6a0c4
Coppola, G.
f7563d11-ff63-48e9-a054-312f5d1b5aef
Iodice, M.
ad2ccfcf-181b-4418-990d-7f2b44a1ddc9
Gioffré, M.
2c5f6929-166c-48ad-ab53-45e86a07bbfc
Ferraro, P.
77cb5d1d-2e86-4afb-967b-a42152a3173f
Paturzo, M.
16617f28-ca22-41d6-b3f5-41d200d78748
Grilli, S.
4e81916a-630b-4178-9a53-d6cc6b20c490
Mailis, S.
233e0768-3f8d-430e-8fdf-92e6f4f6a0c4
Coppola, G.
f7563d11-ff63-48e9-a054-312f5d1b5aef
Iodice, M.
ad2ccfcf-181b-4418-990d-7f2b44a1ddc9
Gioffré, M.
2c5f6929-166c-48ad-ab53-45e86a07bbfc
Ferraro, P.
77cb5d1d-2e86-4afb-967b-a42152a3173f

Paturzo, M., Grilli, S., Mailis, S., Coppola, G., Iodice, M., Gioffré, M. and Ferraro, P. (2008) Flexible coherent diffraction lithography by tunable phase arrays in lithium niobate crystals. Optics Communications, 281 (8), 1950-1953. (doi:10.1016/j.optcom.2007.12.056).

Record type: Article

Abstract

Flexible coherent diffraction lithography is proposed and preliminarily tested by means of an optical phase mask. The phase mask consisted of a two-dimensional hexagonal lattice of reversed ferroelectric domains engineered in a z-cut lithium niobate substrate and was electro-optically tunable. Appropriate phase shift values across adjacent reversed domains were induced by the application of an external electric field along the z-axis of the crystal via transparent electrodes. Photolithographic exposures of the self-imaging near-field diffraction intensity patterns, at various planes corresponding to the Talbot distances, were performed by using different values of the driving electric field signal.

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Published date: 15 April 2008

Identifiers

Local EPrints ID: 52047
URI: https://eprints.soton.ac.uk/id/eprint/52047
ISSN: 0030-4018
PURE UUID: 7c3a5ff6-fa8a-45e1-96f8-cc7b72243ade
ORCID for S. Mailis: ORCID iD orcid.org/0000-0001-8100-2670

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Date deposited: 09 Jun 2008
Last modified: 14 Mar 2019 01:49

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Contributors

Author: M. Paturzo
Author: S. Grilli
Author: S. Mailis ORCID iD
Author: G. Coppola
Author: M. Iodice
Author: M. Gioffré
Author: P. Ferraro

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