Design and input shaping control of a novel scanner for high-speed atomic force. [In special section on Optimized System Performances Through Balanced Control Strategies, The 4th IFAC Symposium on Mechatronic Systems – Mechatronics 2006]
Design and input shaping control of a novel scanner for high-speed atomic force. [In special section on Optimized System Performances Through Balanced Control Strategies, The 4th IFAC Symposium on Mechatronic Systems – Mechatronics 2006]
A novel design of a scanning unit for atomic force microscopy (AFM) is presented that enables scanning speeds three orders of magnitude faster than compared to conventional AFMs. The new scanner is designed for high mechanical resonance frequencies, based on a new scanner design, which is optimized using finite element analysis. For high-speed scanning a new controller, based on input-shaping techniques, has been developed that reduces imaging artifacts due to the scanner’s dynamics. The implementation of the new AFM system offers imaging capabilities of several thousand lines per second with a scanning range of 13 ?m in both scanning directions, and the freedom to choose the fast scan-axis in any arbitrary direction in the X–Y-plane.
afm, fast scanning, nano-positioning, nanotechnology, scanning probe, real-time imaging, mechanical design
282-288
Schitter, Georg
a75aafc7-0804-4bbc-a2ee-792a17aed5fa
Thurner, Philipp J.
ab711ddd-784e-48de-aaad-f56aec40f84f
Hansma, Paul K.
aeab95c4-0f23-4690-8302-72db3316215d
June 2008
Schitter, Georg
a75aafc7-0804-4bbc-a2ee-792a17aed5fa
Thurner, Philipp J.
ab711ddd-784e-48de-aaad-f56aec40f84f
Hansma, Paul K.
aeab95c4-0f23-4690-8302-72db3316215d
Schitter, Georg, Thurner, Philipp J. and Hansma, Paul K.
(2008)
Design and input shaping control of a novel scanner for high-speed atomic force. [In special section on Optimized System Performances Through Balanced Control Strategies, The 4th IFAC Symposium on Mechatronic Systems – Mechatronics 2006].
Mechatronics, 18 (5-6), .
(doi:10.1016/j.mechatronics.2008.02.007).
Abstract
A novel design of a scanning unit for atomic force microscopy (AFM) is presented that enables scanning speeds three orders of magnitude faster than compared to conventional AFMs. The new scanner is designed for high mechanical resonance frequencies, based on a new scanner design, which is optimized using finite element analysis. For high-speed scanning a new controller, based on input-shaping techniques, has been developed that reduces imaging artifacts due to the scanner’s dynamics. The implementation of the new AFM system offers imaging capabilities of several thousand lines per second with a scanning range of 13 ?m in both scanning directions, and the freedom to choose the fast scan-axis in any arbitrary direction in the X–Y-plane.
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Published date: June 2008
Keywords:
afm, fast scanning, nano-positioning, nanotechnology, scanning probe, real-time imaging, mechanical design
Identifiers
Local EPrints ID: 52537
URI: http://eprints.soton.ac.uk/id/eprint/52537
ISSN: 0957-4158
PURE UUID: c11f090f-89b6-4c58-8886-7bde2dd70683
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Date deposited: 10 Jul 2008
Last modified: 15 Mar 2024 10:37
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Contributors
Author:
Georg Schitter
Author:
Paul K. Hansma
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