Novel actuation of an integrated peristaltic micropump

Husband, B., Bu, M., Apostolopoulos, V., Melvin, T. and Evans, A.G.R. (2004) Novel actuation of an integrated peristaltic micropump Microelectronic Engineering, 73-74, pp. 858-863. (doi:10.1016/j.mee.2004.03.065).


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The design and production of sequencing and driver circuits to operate a peristaltic silicon micro pump integrated within a lab-on-a-chip are described. The micropump consists of three serial elements composed of piezoelectric discs glued to a 200 µm glass diaphragm, which upon actuation rise from connecting channels. Sequential actuation of the elements within the micropump in the desired fashion has been shown to pump a one microlitre droplet of water back and forth in a controlled way through the reaction chambers in the lab-on-a-chip. Two electrical circuits have been created and tested and are presented here. The relationship of the relative deflection of the three piezoelectric disks glued to a 200 µm glass diaphragm versus applied voltage has been evaluated using a Michelson interferometer. The novel actuation method developed here has successfully operated the pump and the interferometric method can now be used to optimize the pump.

Item Type: Article
Digital Object Identifier (DOI): doi:10.1016/j.mee.2004.03.065
ISSNs: 0167-9317 (print)
Related URLs:
Keywords: micropump, peristaltic, michelson interferometer, BioMEMS, ?TAS, micro-fluidics
Organisations: Microelectronics Industrial Unit
ePrint ID: 57313
Date :
Date Event
June 2004Published
Date Deposited: 13 Aug 2008
Last Modified: 16 Apr 2017 17:39
Further Information:Google Scholar

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