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Diffusion of neodymium into sputtered films of tantalum pentoxide

Diffusion of neodymium into sputtered films of tantalum pentoxide
Diffusion of neodymium into sputtered films of tantalum pentoxide
In this communication the diffusion of neodymium into rf-sputtered films of tantalum pentoxide (Ta2O5) has been investigated using the SIMS technique. The diffusion characteristics were obtained for a temperature of 1100°C, and the results showed a time-dependent diffusion coefficient that reflects a transition of the sputtered films from the amorphous to the crystalline phase. The potential for doping films of Ta2O5 with neodymium by diffusion, for the realization of novel active optical devices, is also discussed.

0002-7820
2581-2583
Sager, D.A.
605498e8-a964-4ce4-965b-e825ac37502c
Apostolopoulos, V.
8a898740-4c71-4040-a577-9b9d70530b4d
Wilkinson, J.S.
73483cf3-d9f2-4688-9b09-1c84257884ca
Sager, D.A.
605498e8-a964-4ce4-965b-e825ac37502c
Apostolopoulos, V.
8a898740-4c71-4040-a577-9b9d70530b4d
Wilkinson, J.S.
73483cf3-d9f2-4688-9b09-1c84257884ca

Sager, D.A., Apostolopoulos, V. and Wilkinson, J.S. (2002) Diffusion of neodymium into sputtered films of tantalum pentoxide. Journal of the American Ceramic Society, 85 (10), 2581-2583. (doi:10.1111/j.1151-2916.2002.tb00501.x).

Record type: Article

Abstract

In this communication the diffusion of neodymium into rf-sputtered films of tantalum pentoxide (Ta2O5) has been investigated using the SIMS technique. The diffusion characteristics were obtained for a temperature of 1100°C, and the results showed a time-dependent diffusion coefficient that reflects a transition of the sputtered films from the amorphous to the crystalline phase. The potential for doping films of Ta2O5 with neodymium by diffusion, for the realization of novel active optical devices, is also discussed.

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Submitted date: 14 November 2001
Published date: 2002
Organisations: Optoelectronics Research Centre, Physics & Astronomy

Identifiers

Local EPrints ID: 57583
URI: http://eprints.soton.ac.uk/id/eprint/57583
ISSN: 0002-7820
PURE UUID: 6125ba2f-053e-46f8-aa5c-db9f4aae42db
ORCID for V. Apostolopoulos: ORCID iD orcid.org/0000-0003-3733-2191
ORCID for J.S. Wilkinson: ORCID iD orcid.org/0000-0003-4712-1697

Catalogue record

Date deposited: 14 Aug 2008
Last modified: 18 Feb 2021 17:10

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