Fabrication of a microfluidic chip for PCR applications
Fabrication of a microfluidic chip for PCR applications
The fabrication of a microfluidic chip for application to polymerase chain (PCR) is presented. In this chip, a micro peristaltic pump was integrated to pump a reactant droplet. PCR reaction chambers, Pt heaters, temperature sensors, and pn-diodes were fabricated on a silicon wafer. Access holes for fluid and electrical connections, and pump membranes were etched in a Pyrex wafer, which was anodically bonded onto the silicon. Three PZT discs were glued on pump membranes to actuate the micro peristaltic pump.
Bu, M.
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Husband, B.
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Melvin, T.
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Ensell, G.J.
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Pham, N.P.
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Sarro, P.M.
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Wilkinson, J.S.
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Evans, A.G.R.
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November 2003
Bu, M.
62faacb5-690b-45af-8ee9-0c9378b48abf
Husband, B.
88ce6797-521a-4cd2-88ca-0d8182cb9876
Melvin, T.
fd87f5eb-2bb9-48fa-b7be-7100ace9c50f
Ensell, G.J.
95aed82a-8c62-473f-94f2-1574f9da495c
Pham, N.P.
20c16873-acf4-4e50-b3cb-0d88a5379d1b
Sarro, P.M.
3c8adb5e-ad8f-4e09-8a94-d3303fef2506
Wilkinson, J.S.
73483cf3-d9f2-4688-9b09-1c84257884ca
Evans, A.G.R.
082f720d-3830-46d7-ba87-b058af733bc3
Bu, M., Husband, B., Melvin, T., Ensell, G.J., Pham, N.P., Sarro, P.M., Wilkinson, J.S. and Evans, A.G.R.
(2003)
Fabrication of a microfluidic chip for PCR applications.
14th Micromechanics Europe Workshop, Delft, The, Netherlands.
02 - 04 Nov 2003.
Record type:
Conference or Workshop Item
(Paper)
Abstract
The fabrication of a microfluidic chip for application to polymerase chain (PCR) is presented. In this chip, a micro peristaltic pump was integrated to pump a reactant droplet. PCR reaction chambers, Pt heaters, temperature sensors, and pn-diodes were fabricated on a silicon wafer. Access holes for fluid and electrical connections, and pump membranes were etched in a Pyrex wafer, which was anodically bonded onto the silicon. Three PZT discs were glued on pump membranes to actuate the micro peristaltic pump.
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Published date: November 2003
Venue - Dates:
14th Micromechanics Europe Workshop, Delft, The, Netherlands, 2003-11-02 - 2003-11-04
Identifiers
Local EPrints ID: 57744
URI: http://eprints.soton.ac.uk/id/eprint/57744
PURE UUID: d83c01d5-ac38-4b22-a512-cc8f220317cd
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Date deposited: 11 Aug 2008
Last modified: 12 Dec 2021 02:32
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Contributors
Author:
M. Bu
Author:
B. Husband
Author:
T. Melvin
Author:
G.J. Ensell
Author:
N.P. Pham
Author:
P.M. Sarro
Author:
A.G.R. Evans
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