Bu, M., Husband, B., Melvin, T., Ensell, G.J., Pham, N.P., Sarro, P.M., Wilkinson, J.S. and Evans, A.G.R.
Fabrication of a microfluidic chip for PCR applications
At 14th Micromechanics Europe Workshop, Netherlands.
02 - 04 Nov 2003.
Full text not available from this repository.
The fabrication of a microfluidic chip for application to polymerase chain (PCR) is presented. In this chip, a micro peristaltic pump was integrated to pump a reactant droplet. PCR reaction chambers, Pt heaters, temperature sensors, and pn-diodes were fabricated on a silicon wafer. Access holes for fluid and electrical connections, and pump membranes were etched in a Pyrex wafer, which was anodically bonded onto the silicon. Three PZT discs were glued on pump membranes to actuate the micro peristaltic pump.
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