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Development of nanostructures for thermoelectric microgenerators using ion-track lithography

Record type: Article

A novel fabrication process for nanostructures for thermoelectric microgenerators, based on a combination of a traditional silicon microfabrication techniques, electroplating and submicron ion-track nanolithography, is discussed. Ion-track etched polyimide nanotemplates (30–80 nm pore diameters) are used to grow Bi2Te3 nanowires by electroplating. The Bi2Te3 film’s microstructural and thermoelectric properties are reported.

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Citation

Koukharenko, E., Li, X., Nandhakumar, I.S., Schiedt, B., Trautmann, C., Speed, J., Tudor, M.J., Beeby, S.P. and White, N.M. (2008) Development of nanostructures for thermoelectric microgenerators using ion-track lithography Electronics Letters, 44, (7), pp. 500-501. (doi:10.1049/el:20080111).

More information

Published date: 27 March 2008
Organisations: Engineering Mats & Surface Engineerg Gp

Identifiers

Local EPrints ID: 63304
URI: http://eprints.soton.ac.uk/id/eprint/63304
ISSN: 0013-5194
PURE UUID: 405305d1-a8da-4f77-80d1-f1d969a5e559
ORCID for S.P. Beeby: ORCID iD orcid.org/0000-0002-0800-1759
ORCID for N.M. White: ORCID iD orcid.org/0000-0003-1532-6452

Catalogue record

Date deposited: 30 Sep 2008
Last modified: 17 Jul 2017 14:18

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Contributors

Author: E. Koukharenko
Author: X. Li
Author: B. Schiedt
Author: C. Trautmann
Author: J. Speed
Author: M.J. Tudor
Author: S.P. Beeby ORCID iD
Author: N.M. White ORCID iD

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