Silicon-based photonic crystal structures
Silicon-based photonic crystal structures
It is likely that the commercialisation of Photonic Crystal (PC) technology will require the high-volume capabilities provided by semiconductor nanofabrication processes. To this end, a Silicon-compatible PC waveguide could form the basic building block of an all-optical circuit. This presentation will discuss the development of PC research at Southampton University (UK) which began with deep photoelectrochemically etched holes in single-crystal Silicon. This initial work progressed to an all dielectric waveguide structure on a Silicon substrate, with the materials utilised being compatible with a CMOS process. PC nanofabrication and optical characterisation using these waveguiding structures will be described in detail.
Parker, G.J.
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Charlton, M.D.B.
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Zoorob, M.E.
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Baumberg, J.J.
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Netti, M.C.
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Cox, S.J.
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Wilkinson, J.S.
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2001
Parker, G.J.
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Charlton, M.D.B.
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Zoorob, M.E.
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Baumberg, J.J.
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Netti, M.C.
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Cox, S.J.
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Wilkinson, J.S.
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Parker, G.J., Charlton, M.D.B., Zoorob, M.E., Baumberg, J.J., Netti, M.C., Cox, S.J. and Wilkinson, J.S.
(2001)
Silicon-based photonic crystal structures.
The Knowledge Foundation International Conference on Photonic Nanostructures, San Diego, USA.
11 - 12 Oct 2001.
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Conference or Workshop Item
(Paper)
Abstract
It is likely that the commercialisation of Photonic Crystal (PC) technology will require the high-volume capabilities provided by semiconductor nanofabrication processes. To this end, a Silicon-compatible PC waveguide could form the basic building block of an all-optical circuit. This presentation will discuss the development of PC research at Southampton University (UK) which began with deep photoelectrochemically etched holes in single-crystal Silicon. This initial work progressed to an all dielectric waveguide structure on a Silicon substrate, with the materials utilised being compatible with a CMOS process. PC nanofabrication and optical characterisation using these waveguiding structures will be described in detail.
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Published date: 2001
Venue - Dates:
The Knowledge Foundation International Conference on Photonic Nanostructures, San Diego, USA, 2001-10-11 - 2001-10-12
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Local EPrints ID: 63349
URI: http://eprints.soton.ac.uk/id/eprint/63349
PURE UUID: c54e16b1-c5bc-4954-b4e5-606ba4c818a9
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Date deposited: 21 Oct 2008
Last modified: 14 Mar 2024 02:32
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Contributors
Author:
G.J. Parker
Author:
M.D.B. Charlton
Author:
M.E. Zoorob
Author:
J.J. Baumberg
Author:
M.C. Netti
Author:
S.J. Cox
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