Parker, G.J., Charlton, M.D.B., Zoorob, M.E., Baumberg, J.J., Netti, M.C., Cox, S.J. and Wilkinson, J.S.
Silicon-based photonic crystal structures
At The Knowledge Foundation International Conference on Photonic Nanostructures.
11 - 12 Oct 2001.
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It is likely that the commercialisation of Photonic Crystal (PC) technology will require the high-volume capabilities provided by semiconductor nanofabrication processes. To this end, a Silicon-compatible PC waveguide could form the basic building block of an all-optical circuit. This presentation will discuss the development of PC research at Southampton University (UK) which began with deep photoelectrochemically etched holes in single-crystal Silicon. This initial work progressed to an all dielectric waveguide structure on a Silicon substrate, with the materials utilised being compatible with a CMOS process. PC nanofabrication and optical characterisation using these waveguiding structures will be described in detail.
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