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Silicon-based photonic crystal structures

Parker, G.J., Charlton, M.D.B., Zoorob, M.E., Baumberg, J.J., Netti, M.C., Cox, S.J. and Wilkinson, J.S. (2001) Silicon-based photonic crystal structures At The Knowledge Foundation International Conference on Photonic Nanostructures. 11 - 12 Oct 2001.

Record type: Conference or Workshop Item (Paper)


It is likely that the commercialisation of Photonic Crystal (PC) technology will require the high-volume capabilities provided by semiconductor nanofabrication processes. To this end, a Silicon-compatible PC waveguide could form the basic building block of an all-optical circuit. This presentation will discuss the development of PC research at Southampton University (UK) which began with deep photoelectrochemically etched holes in single-crystal Silicon. This initial work progressed to an all dielectric waveguide structure on a Silicon substrate, with the materials utilised being compatible with a CMOS process. PC nanofabrication and optical characterisation using these waveguiding structures will be described in detail.

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Published date: 2001
Venue - Dates: The Knowledge Foundation International Conference on Photonic Nanostructures, 2001-10-11 - 2001-10-12


Local EPrints ID: 63349
PURE UUID: c54e16b1-c5bc-4954-b4e5-606ba4c818a9
ORCID for J.S. Wilkinson: ORCID iD

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Date deposited: 21 Oct 2008
Last modified: 17 Jul 2017 14:17

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Author: G.J. Parker
Author: M.D.B. Charlton
Author: M.E. Zoorob
Author: J.J. Baumberg
Author: M.C. Netti
Author: S.J. Cox
Author: J.S. Wilkinson ORCID iD

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