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A reassessment of materials issues in microelectromechanical systems (MEMS)

Record type: Article

Over the past 7 years there has been an explosion of research activity into materials for MicroElectroMechanical Systems (MEMS). This paper reviews the current issues associated with materials for MEMS. Five topical areas are addressed: the effect of lengthscale, the selection of materials and processes, the MEMS material set, microfabrication processes and material characterization. Each of these areas is examined, with particular emphasis on the potential impact of materials solutions. The paper concludes with an assessment of the progress in MEMS materials made since 2000.

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Citation

Jiang, Liudi and Spearing, S. Mark (2007) A reassessment of materials issues in microelectromechanical systems (MEMS) Journal of the Indian Institute of Science, 87, (3), pp. 363-385.

More information

Published date: July 2007
Additional Information: Invited review.
Keywords: mems, materials, review
Organisations: Engineering Mats & Surface Engineerg Gp

Identifiers

Local EPrints ID: 63546
URI: http://eprints.soton.ac.uk/id/eprint/63546
ISSN: 0970-4140
PURE UUID: c3fc88c8-fad6-4a6a-a5b8-75ce23ee0b5c
ORCID for Liudi Jiang: ORCID iD orcid.org/0000-0002-3400-825X

Catalogue record

Date deposited: 20 Oct 2008
Last modified: 17 Jul 2017 14:16

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