A reassessment of materials issues in microelectromechanical systems (MEMS)

Jiang, Liudi and Spearing, S. Mark (2007) A reassessment of materials issues in microelectromechanical systems (MEMS) Journal of the Indian Institute of Science, 87, (3), pp. 363-385.


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Over the past 7 years there has been an explosion of research activity into materials for MicroElectroMechanical Systems (MEMS). This paper reviews the current issues associated with materials for MEMS. Five topical areas are addressed: the effect of lengthscale, the selection of materials and processes, the MEMS material set, microfabrication processes and material characterization. Each of these areas is examined, with particular emphasis on the potential impact of materials solutions. The paper concludes with an assessment of the progress in MEMS materials made since 2000.

Item Type: Article
Additional Information: Invited review.
ISSNs: 0970-4140 (print)
Related URLs:
Keywords: mems, materials, review
Organisations: Engineering Mats & Surface Engineerg Gp
ePrint ID: 63546
Date :
Date Event
July 2007Published
Date Deposited: 20 Oct 2008
Last Modified: 16 Apr 2017 17:24
Further Information:Google Scholar
URI: http://eprints.soton.ac.uk/id/eprint/63546

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