The University of Southampton
University of Southampton Institutional Repository

Nanofabrication of SiC templates for direct hot embossing for metallic photonic structures and meta materials

Nanofabrication of SiC templates for direct hot embossing for metallic photonic structures and meta materials
Nanofabrication of SiC templates for direct hot embossing for metallic photonic structures and meta materials
A reliable nanofabrication process for hard templates in SiC amorphous film was developed. The process involves high resolution electron beam lithography and reactive ion etch for nanosize structures in SiC. Study of the RIE property in SiC narrow trenches and dot array indicates that various profiles of sidewall can be achieved by controlling the etch power and ratio of fluorine-based gas mixture. It was also discovered that SiC material is RIE lag free in dry etch, which opens up a broader applications for deep and narrow structures. Applications of SiC templates for hot embossing into metals and plastics prove that the SiC templates formed in amorphous film are hard enough for the fabrications of metallic photonic structures and meta materials.
sic templates, reactive ion etch, hot embossing, photonic structures, meta materials
0167-9317
1147-1151
Chen, Yifang
fb868aa4-ecb4-4203-a0a8-88c2195a2bae
Zhou, Yun
97eccec6-b835-4df4-b190-9de0f51c07ef
Pan, Genhua
81bf7df6-a4bd-4037-b062-7502b5c9ea95
Huq, Ejaz
6ba52b03-395d-4361-96b0-5f0d9d7eb746
Lu, Bing-Rui
cf8db638-f255-4531-91d3-6c53de353961
Xie, Shen-Qi
185d5932-beb9-4a11-9a4a-c98d5f9ee1d4
Wan, Jing
dc1036b5-688a-492c-b041-15392528892c
Shu, Zhen
4f645721-ee09-40c6-a792-bcc33116b6fc
Qu, Xin-Ping
8572bfee-79e1-4c9c-b178-02ef720b0b33
Liu, Ran
4ea42073-d449-4d6d-abed-86fbb66842e5
Banu, S.
ccf7dbae-dce6-4c1e-ab40-860cc3aee72a
Birtwell, S.W.
8dca4d3a-2c9e-415c-b9c2-6b3a07bbf5c4
Jiang, Liudi
374f2414-51f0-418f-a316-e7db0d6dc4d1
Chen, Yifang
fb868aa4-ecb4-4203-a0a8-88c2195a2bae
Zhou, Yun
97eccec6-b835-4df4-b190-9de0f51c07ef
Pan, Genhua
81bf7df6-a4bd-4037-b062-7502b5c9ea95
Huq, Ejaz
6ba52b03-395d-4361-96b0-5f0d9d7eb746
Lu, Bing-Rui
cf8db638-f255-4531-91d3-6c53de353961
Xie, Shen-Qi
185d5932-beb9-4a11-9a4a-c98d5f9ee1d4
Wan, Jing
dc1036b5-688a-492c-b041-15392528892c
Shu, Zhen
4f645721-ee09-40c6-a792-bcc33116b6fc
Qu, Xin-Ping
8572bfee-79e1-4c9c-b178-02ef720b0b33
Liu, Ran
4ea42073-d449-4d6d-abed-86fbb66842e5
Banu, S.
ccf7dbae-dce6-4c1e-ab40-860cc3aee72a
Birtwell, S.W.
8dca4d3a-2c9e-415c-b9c2-6b3a07bbf5c4
Jiang, Liudi
374f2414-51f0-418f-a316-e7db0d6dc4d1

Chen, Yifang, Zhou, Yun, Pan, Genhua, Huq, Ejaz, Lu, Bing-Rui, Xie, Shen-Qi, Wan, Jing, Shu, Zhen, Qu, Xin-Ping, Liu, Ran, Banu, S., Birtwell, S.W. and Jiang, Liudi (2008) Nanofabrication of SiC templates for direct hot embossing for metallic photonic structures and meta materials. [in special issue: Proceedings of the Micro- and Nano-Engineering 2007 Conference - MNE 2007] Microelectronic Engineering, 85 (5-6), 1147-1151. (doi:10.1016/j.mee.2008.01.002).

Record type: Article

Abstract

A reliable nanofabrication process for hard templates in SiC amorphous film was developed. The process involves high resolution electron beam lithography and reactive ion etch for nanosize structures in SiC. Study of the RIE property in SiC narrow trenches and dot array indicates that various profiles of sidewall can be achieved by controlling the etch power and ratio of fluorine-based gas mixture. It was also discovered that SiC material is RIE lag free in dry etch, which opens up a broader applications for deep and narrow structures. Applications of SiC templates for hot embossing into metals and plastics prove that the SiC templates formed in amorphous film are hard enough for the fabrications of metallic photonic structures and meta materials.

Full text not available from this repository.

More information

Published date: May 2008
Keywords: sic templates, reactive ion etch, hot embossing, photonic structures, meta materials
Organisations: Engineering Mats & Surface Engineerg Gp

Identifiers

Local EPrints ID: 63548
URI: https://eprints.soton.ac.uk/id/eprint/63548
ISSN: 0167-9317
PURE UUID: 20f5dafa-c5e6-4fe7-850a-94ca825b148f
ORCID for Liudi Jiang: ORCID iD orcid.org/0000-0002-3400-825X

Catalogue record

Date deposited: 15 Oct 2008
Last modified: 14 Mar 2019 01:42

Export record

Altmetrics

Download statistics

Downloads from ePrints over the past year. Other digital versions may also be available to download e.g. from the publisher's website.

View more statistics

Atom RSS 1.0 RSS 2.0

Contact ePrints Soton: eprints@soton.ac.uk

ePrints Soton supports OAI 2.0 with a base URL of https://eprints.soton.ac.uk/cgi/oai2

This repository has been built using EPrints software, developed at the University of Southampton, but available to everyone to use.

We use cookies to ensure that we give you the best experience on our website. If you continue without changing your settings, we will assume that you are happy to receive cookies on the University of Southampton website.

×