The University of Southampton
University of Southampton Institutional Repository

A Review of silicon carbide development in MEMS applications

Jiang, Liudi and Cheung, R. (2009) A Review of silicon carbide development in MEMS applications International Journal of Nanomanufacturing, 2, (3/4), pp. 225-240.

Record type: Article


Due to its desirable material properties, Silicon Carbide (SiC) has
become an alternative material to replace Si for Microelectromechanical
Systems (MEMS) applications in harsh environments. To promote SiC MEMS
development towards future cost-effective products, main technology areas in
material deposition and processes have attracted significant interest. The
developments in these areas have contributed to the rapid emergence of SiC
MEMS prototypes. In this paper, we give an overview of the important
developments in SiC material formation and fabrication processes in recent
years. Some of the most interesting state-of-the-art SiC MEMS devices are
reviewed. This highlights the major progresses in SiC MEMS developed thus
far. This paper also looks into the prospect of SiC MEMS drawing attention to
potential issues.

PDF IJNM_review_1st_2009.pdf - Other
Download (795kB)

More information

Published date: 2009
Additional Information: Invited review
Organisations: Engineering Mats & Surface Engineerg Gp


Local EPrints ID: 63549
ISSN: 1746-9392
PURE UUID: 8c864077-1d22-47d7-be60-a28d47e622de
ORCID for Liudi Jiang: ORCID iD

Catalogue record

Date deposited: 15 Oct 2008
Last modified: 17 Jul 2017 14:16

Export record


Author: Liudi Jiang ORCID iD
Author: R. Cheung

University divisions

Download statistics

Downloads from ePrints over the past year. Other digital versions may also be available to download e.g. from the publisher's website.

View more statistics

Atom RSS 1.0 RSS 2.0

Contact ePrints Soton:

ePrints Soton supports OAI 2.0 with a base URL of

This repository has been built using EPrints software, developed at the University of Southampton, but available to everyone to use.

We use cookies to ensure that we give you the best experience on our website. If you continue without changing your settings, we will assume that you are happy to receive cookies on the University of Southampton website.