The scaling of strength in the design of high-power MEMS structures

Noonan, Erin E, Peles, Yoav, Protz, Christopher S. and Spearing, Simon Mark (2008) The scaling of strength in the design of high-power MEMS structures Scripta Materialia, 59, (9), pp. 927-930. (doi:10.1016/j.scriptamat.2008.03.045).


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The prediction of the strength of complicated structures based on material test data is important for high-power density microelectromechanical systems. Probalistic analysis is used to predict the strength of pressure-tested microfabricated silicon structures from simpler test specimens. The predictions are found to be non-conservative. This is probably due to interactions between the etching process and the structural geometry, which changes the flaw distribution between the two statistical populations. In both cases secondary smoothing etches recover the strength.

Item Type: Article
Digital Object Identifier (DOI): doi:10.1016/j.scriptamat.2008.03.045
ISSNs: 1359-6462 (print)
Keywords: microelectromechanical systems, silicon, fracture, weakest link statistics, fractography
Organisations: Engineering Mats & Surface Engineerg Gp
ePrint ID: 64555
Date :
Date Event
November 2008Published
Date Deposited: 23 Dec 2008
Last Modified: 16 Apr 2017 17:19
Further Information:Google Scholar

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