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The scaling of strength in the design of high-power MEMS structures

Noonan, Erin E, Peles, Yoav, Protz, Christopher S. and Spearing, Simon Mark (2008) The scaling of strength in the design of high-power MEMS structures Scripta Materialia, 59, (9), pp. 927-930. (doi:10.1016/j.scriptamat.2008.03.045).

Record type: Article


The prediction of the strength of complicated structures based on material test data is important for high-power density microelectromechanical systems. Probalistic analysis is used to predict the strength of pressure-tested microfabricated silicon structures from simpler test specimens. The predictions are found to be non-conservative. This is probably due to interactions between the etching process and the structural geometry, which changes the flaw distribution between the two statistical populations. In both cases secondary smoothing etches recover the strength.

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Published date: November 2008
Keywords: microelectromechanical systems, silicon, fracture, weakest link statistics, fractography
Organisations: Engineering Mats & Surface Engineerg Gp


Local EPrints ID: 64555
ISSN: 1359-6462
PURE UUID: cdaa5950-23e2-4bed-9177-025ca0bc4590

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Date deposited: 23 Dec 2008
Last modified: 17 Jul 2017 14:12

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Author: Erin E Noonan
Author: Yoav Peles
Author: Christopher S. Protz

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