Complex rough surface metrology: suitable techniques and parameters
Complex rough surface metrology: suitable techniques and parameters
complex, rough, surface, metrology, techniques, parameters
Ang, K.C.
316485c0-def8-4a59-9bbd-0b042aa245a2
Wood, R.J.K.
d9523d31-41a8-459a-8831-70e29ffe8a73
Wang, L.
c50767b1-7474-4094-9b06-4fe64e9fe362
Ang, K.C.
316485c0-def8-4a59-9bbd-0b042aa245a2
Wood, R.J.K.
d9523d31-41a8-459a-8831-70e29ffe8a73
Wang, L.
c50767b1-7474-4094-9b06-4fe64e9fe362
Ang, K.C., Wood, R.J.K. and Wang, L.
(2008)
Complex rough surface metrology: suitable techniques and parameters.
Journal of Physics D: Applied Physics.
(Submitted)
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Submitted date: 2008
Keywords:
complex, rough, surface, metrology, techniques, parameters
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Local EPrints ID: 64936
URI: http://eprints.soton.ac.uk/id/eprint/64936
ISSN: 0022-3727
PURE UUID: ec6c8a8f-f454-4080-9b77-9f9a61d0c91a
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Date deposited: 27 Jan 2009
Last modified: 12 Dec 2021 03:18
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Author:
K.C. Ang
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