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Investigation of gold sputter coated vertically aligned multi-walled carbon nanotubes for RF MEMS contact surfaces.

Record type: Book Section

A novel approach has been developed for the long-standing problem of achieving durable contact surfaces for Radio Frequency MEMS switches. The performance of gold-coated vertically aligned multi-walled carbon nanotubes is investigated under the low force electrical contact conditions typical of MEMS switches. The carbon nanotubes provide a compliant support for the conducting gold surface layer, minimizing the degradation, and adhesion between the contact surfaces which is the principal source of wear in such contacts. Greatly increased lifetimes have been obtained over monolithic gold contact surfaces

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Citation

Yunus, Esa, Spearing, Mark and McBride, John (2008) Investigation of gold sputter coated vertically aligned multi-walled carbon nanotubes for RF MEMS contact surfaces. In, Spearing, S.M., Vengallatore, S., Sheppard, N. and Bagdahn, J. (eds.) Microelectromechanical Systems—Materials and Devices II. MRS Fall Meeting Warrendale, USA, Materials Research Society (MRS Proceedings, 1139). (doi:10.1557/PROC-1139-GG05-04).

More information

Published date: 2008
Additional Information: Paper #: 1139-GG05-04
Venue - Dates: MRS Fall Meeting, 2008-12-01 - 2008-12-05

Identifiers

Local EPrints ID: 69325
URI: http://eprints.soton.ac.uk/id/eprint/69325
PURE UUID: 8273e72a-ea59-43d5-a43f-577714b4dfc0

Catalogue record

Date deposited: 04 Nov 2009
Last modified: 19 Jul 2017 00:12

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Contributors

Author: Esa Yunus
Author: Mark Spearing
Author: John McBride
Editor: S.M. Spearing
Editor: S. Vengallatore
Editor: N. Sheppard
Editor: J. Bagdahn

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