Yunus, Esa, Spearing, Mark and McBride, John
Investigation of gold sputter coated vertically aligned multi-walled carbon nanotubes for RF MEMS contact surfaces.
Spearing, S.M., Vengallatore, S., Sheppard, N. and Bagdahn, J. (eds.)
Microelectromechanical Systems—Materials and Devices II.
MRS Fall Meeting
Materials Research Society
(MRS Proceedings, 1139).
- Accepted Manuscript
Restricted to Registered users only
A novel approach has been developed for the long-standing problem of achieving durable contact surfaces for Radio Frequency MEMS switches. The performance of gold-coated vertically aligned multi-walled carbon nanotubes is investigated under the low force electrical contact conditions typical of MEMS switches. The carbon nanotubes provide a compliant support for the conducting gold surface layer, minimizing the degradation, and adhesion between the contact surfaces which is the principal source of wear in such contacts. Greatly increased lifetimes have been obtained over monolithic gold contact surfaces
Actions (login required)