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Investigation of gold sputter coated vertically aligned multi-walled carbon nanotubes for RF MEMS contact surfaces.

Yunus, Esa, Spearing, Mark and McBride, John (2008) Investigation of gold sputter coated vertically aligned multi-walled carbon nanotubes for RF MEMS contact surfaces. In, Spearing, S.M., Vengallatore, S., Sheppard, N. and Bagdahn, J. (eds.) Microelectromechanical Systems—Materials and Devices II. MRS Fall Meeting Warrendale, USA, Materials Research Society (MRS Proceedings, 1139).

Record type: Book Section


A novel approach has been developed for the long-standing problem of achieving durable contact surfaces for Radio Frequency MEMS switches. The performance of gold-coated vertically aligned multi-walled carbon nanotubes is investigated under the low force electrical contact conditions typical of MEMS switches. The carbon nanotubes provide a compliant support for the conducting gold surface layer, minimizing the degradation, and adhesion between the contact surfaces which is the principal source of wear in such contacts. Greatly increased lifetimes have been obtained over monolithic gold contact surfaces

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Published date: 2008
Additional Information: Paper #: 1139-GG05-04
Venue - Dates: MRS Fall Meeting, 2008-12-01 - 2008-12-05


Local EPrints ID: 69325
PURE UUID: 8273e72a-ea59-43d5-a43f-577714b4dfc0

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Date deposited: 04 Nov 2009
Last modified: 16 Oct 2017 21:02

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Author: Esa Yunus
Author: Mark Spearing
Author: John McBride
Editor: S.M. Spearing
Editor: S. Vengallatore
Editor: N. Sheppard
Editor: J. Bagdahn

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