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Etching and printing of diffractive optical microstructures by a femtosecond excimer laser

Etching and printing of diffractive optical microstructures by a femtosecond excimer laser
Etching and printing of diffractive optical microstructures by a femtosecond excimer laser
Diffractive optics fabrication is performed by two complementary processing methods that rely on the photoablation of materials by ultrashort UV laser pulses. The spatially selective ablation of materials permits the direct microetching of high-quality surface-relief patterns. In addition, the direct, spatially selective transfer of the ablated material onto planar and nonplanar receiving substrates provides a complementary microprinting operation. The radiation from the ultrashort pulsed excimer laser results in superior quality at relatively low-energy density levels, owing to the short absorption length and minimal thermal-diffusion effects. Computer-generated holographic structures are produced by both modes of operation. Submicrometer features, including Bragg-type structures, are microprinted onto planar and high-curvature optical-fiber surfaces, demonstrating the unique ability of the schemes for complex microstructure and potentially nanostructure development.
0003-6935
2301-2308
Mailis, Sakellaris
233e0768-3f8d-430e-8fdf-92e6f4f6a0c4
Zergioti, Ioanna
9d0d23b6-6793-4f1c-a503-ab225a9f148a
Koundourakis, George
9fd598f3-1e78-4f38-b14a-2307f746f150
Ikiades, Aris
97523a8e-8252-4f38-9cb4-5f40ef95fda1
Patentalaki, Argyro
909d7a20-bab8-4543-b501-6063a54df1fd
Papakonstantinou, Pagona
a6445d4e-cf61-4f48-8c67-9b2fd912da49
Vainos, Nikolaos A.
3288f903-d80b-4b39-9042-26106eb3f064
Fotakis, Costas
ae4a86f1-2e67-43f7-bb53-2417f7c11cbe
Mailis, Sakellaris
233e0768-3f8d-430e-8fdf-92e6f4f6a0c4
Zergioti, Ioanna
9d0d23b6-6793-4f1c-a503-ab225a9f148a
Koundourakis, George
9fd598f3-1e78-4f38-b14a-2307f746f150
Ikiades, Aris
97523a8e-8252-4f38-9cb4-5f40ef95fda1
Patentalaki, Argyro
909d7a20-bab8-4543-b501-6063a54df1fd
Papakonstantinou, Pagona
a6445d4e-cf61-4f48-8c67-9b2fd912da49
Vainos, Nikolaos A.
3288f903-d80b-4b39-9042-26106eb3f064
Fotakis, Costas
ae4a86f1-2e67-43f7-bb53-2417f7c11cbe

Mailis, Sakellaris, Zergioti, Ioanna, Koundourakis, George, Ikiades, Aris, Patentalaki, Argyro, Papakonstantinou, Pagona, Vainos, Nikolaos A. and Fotakis, Costas (1999) Etching and printing of diffractive optical microstructures by a femtosecond excimer laser. Applied Optics, 38 (11), 2301-2308. (doi:10.1364/AO.38.002301).

Record type: Article

Abstract

Diffractive optics fabrication is performed by two complementary processing methods that rely on the photoablation of materials by ultrashort UV laser pulses. The spatially selective ablation of materials permits the direct microetching of high-quality surface-relief patterns. In addition, the direct, spatially selective transfer of the ablated material onto planar and nonplanar receiving substrates provides a complementary microprinting operation. The radiation from the ultrashort pulsed excimer laser results in superior quality at relatively low-energy density levels, owing to the short absorption length and minimal thermal-diffusion effects. Computer-generated holographic structures are produced by both modes of operation. Submicrometer features, including Bragg-type structures, are microprinted onto planar and high-curvature optical-fiber surfaces, demonstrating the unique ability of the schemes for complex microstructure and potentially nanostructure development.

Full text not available from this repository.

More information

Published date: 1999

Identifiers

Local EPrints ID: 77745
URI: https://eprints.soton.ac.uk/id/eprint/77745
ISSN: 0003-6935
PURE UUID: 1b130d15-6c1b-4e20-aeda-38317ac8fdbe
ORCID for Sakellaris Mailis: ORCID iD orcid.org/0000-0001-8100-2670

Catalogue record

Date deposited: 11 Mar 2010
Last modified: 06 Jun 2018 12:56

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