Microstructuring of lithium niobate using differential etch-rate between inverted and non-inverted ferroelectric domains
Microstructuring of lithium niobate using differential etch-rate between inverted and non-inverted ferroelectric domains
Single crystal samples of lithium niobate have been spatially patterned with photoresist, and subsequently domain inverted using electric field poling, to produce a range of two dimensional spatial domain structures. Differential etching has subsequently been carried out using mixtures of hydrofluoric and nitric acids, at a range of temperatures between room temperature and the boiling point. The structures produced show very smooth, well defined, deep features, which have a range of applications in optical ridge waveguides, alignment structures, V-grooves, and micro-tips. Details are given of the fabrication procedures, and examples of structures are shown.
246-254
Barry, I.E.
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Ross, G.W.
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Smith, P.G.R.
8979668a-8b7a-4838-9a74-1a7cfc6665f6
Eason, R.W.
e38684c3-d18c-41b9-a4aa-def67283b020
Cook, G.
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November 1998
Barry, I.E.
d4c9ca54-8091-495f-81b3-a73c4fea734d
Ross, G.W.
e881119e-2126-442e-a24d-506dac48a4a4
Smith, P.G.R.
8979668a-8b7a-4838-9a74-1a7cfc6665f6
Eason, R.W.
e38684c3-d18c-41b9-a4aa-def67283b020
Cook, G.
fbf121a4-8973-4033-8759-81f517347b6e
Barry, I.E., Ross, G.W., Smith, P.G.R., Eason, R.W. and Cook, G.
(1998)
Microstructuring of lithium niobate using differential etch-rate between inverted and non-inverted ferroelectric domains.
Materials Letters, 37 (4-5), .
(doi:10.1016/S0167-577X(98)00100-1).
Abstract
Single crystal samples of lithium niobate have been spatially patterned with photoresist, and subsequently domain inverted using electric field poling, to produce a range of two dimensional spatial domain structures. Differential etching has subsequently been carried out using mixtures of hydrofluoric and nitric acids, at a range of temperatures between room temperature and the boiling point. The structures produced show very smooth, well defined, deep features, which have a range of applications in optical ridge waveguides, alignment structures, V-grooves, and micro-tips. Details are given of the fabrication procedures, and examples of structures are shown.
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Published date: November 1998
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Local EPrints ID: 77914
URI: http://eprints.soton.ac.uk/id/eprint/77914
ISSN: 0167-577X
PURE UUID: a23669e5-67f6-49fd-ac69-527466cb14be
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Date deposited: 11 Mar 2010
Last modified: 14 Mar 2024 02:38
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Author:
I.E. Barry
Author:
G.W. Ross
Author:
G. Cook
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