The University of Southampton
University of Southampton Institutional Repository

Microstructuring of lithium niobate using differential etch-rate between inverted and non-inverted ferroelectric domains

Microstructuring of lithium niobate using differential etch-rate between inverted and non-inverted ferroelectric domains
Microstructuring of lithium niobate using differential etch-rate between inverted and non-inverted ferroelectric domains
Single crystal samples of lithium niobate have been spatially patterned with photoresist, and subsequently domain inverted using electric field poling, to produce a range of two dimensional spatial domain structures. Differential etching has subsequently been carried out using mixtures of hydrofluoric and nitric acids, at a range of temperatures between room temperature and the boiling point. The structures produced show very smooth, well defined, deep features, which have a range of applications in optical ridge waveguides, alignment structures, V-grooves, and micro-tips. Details are given of the fabrication procedures, and examples of structures are shown.
0167-577X
246-254
Barry, I.E.
d4c9ca54-8091-495f-81b3-a73c4fea734d
Ross, G.W.
e881119e-2126-442e-a24d-506dac48a4a4
Smith, P.G.R.
8979668a-8b7a-4838-9a74-1a7cfc6665f6
Eason, R.W.
e38684c3-d18c-41b9-a4aa-def67283b020
Cook, G.
fbf121a4-8973-4033-8759-81f517347b6e
Barry, I.E.
d4c9ca54-8091-495f-81b3-a73c4fea734d
Ross, G.W.
e881119e-2126-442e-a24d-506dac48a4a4
Smith, P.G.R.
8979668a-8b7a-4838-9a74-1a7cfc6665f6
Eason, R.W.
e38684c3-d18c-41b9-a4aa-def67283b020
Cook, G.
fbf121a4-8973-4033-8759-81f517347b6e

Barry, I.E., Ross, G.W., Smith, P.G.R., Eason, R.W. and Cook, G. (1998) Microstructuring of lithium niobate using differential etch-rate between inverted and non-inverted ferroelectric domains. Materials Letters, 37 (4-5), 246-254. (doi:10.1016/S0167-577X(98)00100-1).

Record type: Article

Abstract

Single crystal samples of lithium niobate have been spatially patterned with photoresist, and subsequently domain inverted using electric field poling, to produce a range of two dimensional spatial domain structures. Differential etching has subsequently been carried out using mixtures of hydrofluoric and nitric acids, at a range of temperatures between room temperature and the boiling point. The structures produced show very smooth, well defined, deep features, which have a range of applications in optical ridge waveguides, alignment structures, V-grooves, and micro-tips. Details are given of the fabrication procedures, and examples of structures are shown.

Full text not available from this repository.

More information

Published date: November 1998

Identifiers

Local EPrints ID: 77914
URI: https://eprints.soton.ac.uk/id/eprint/77914
ISSN: 0167-577X
PURE UUID: a23669e5-67f6-49fd-ac69-527466cb14be
ORCID for R.W. Eason: ORCID iD orcid.org/0000-0001-9704-2204

Catalogue record

Date deposited: 11 Mar 2010
Last modified: 20 Jul 2019 01:25

Export record

Altmetrics

Contributors

Author: I.E. Barry
Author: G.W. Ross
Author: P.G.R. Smith
Author: R.W. Eason ORCID iD
Author: G. Cook

University divisions

Download statistics

Downloads from ePrints over the past year. Other digital versions may also be available to download e.g. from the publisher's website.

View more statistics

Atom RSS 1.0 RSS 2.0

Contact ePrints Soton: eprints@soton.ac.uk

ePrints Soton supports OAI 2.0 with a base URL of https://eprints.soton.ac.uk/cgi/oai2

This repository has been built using EPrints software, developed at the University of Southampton, but available to everyone to use.

We use cookies to ensure that we give you the best experience on our website. If you continue without changing your settings, we will assume that you are happy to receive cookies on the University of Southampton website.

×