Indium tin oxide overlayered waveguides for sensor applications
Indium tin oxide overlayered waveguides for sensor applications
The use of indium tin oxide (ITO) thin films as electrodes for integrated optical electrochemical sensor devices is discussed. The effect of various thicknesses of ITO overlayers exhibiting low resistivity and high transparency on potassium ion-exchanged waveguides fabricated in glass substrates is investigated over the wavelength range 500-900 nm. ITO overlayers are formed by reactive thermal evaporation in oxygen, followed by annealing in air to a maximum temperature of 320°C. With air as superstrate, losses in the waveguides were found to increase dramatically above 30nm ITO thickness for TE polarization, and above 50nm thickness for TM. Losses were increased over the whole wavelength range for a superstrate index close to that of water. A one-dimensional multilayer waveguide model is used in the interpretation of the experimental results.
7066-7072
Luff, B.Jonathan
627665d3-1741-44e5-9994-7568ef2847a1
Wilkinson, James S.
73483cf3-d9f2-4688-9b09-1c84257884ca
Perrone, Guido
fe281dde-a2d9-4aa1-a7bd-6d76a78a22af
1997
Luff, B.Jonathan
627665d3-1741-44e5-9994-7568ef2847a1
Wilkinson, James S.
73483cf3-d9f2-4688-9b09-1c84257884ca
Perrone, Guido
fe281dde-a2d9-4aa1-a7bd-6d76a78a22af
Luff, B.Jonathan, Wilkinson, James S. and Perrone, Guido
(1997)
Indium tin oxide overlayered waveguides for sensor applications.
Applied Optics, 36 (27), .
(doi:10.1364/AO.36.007066).
Abstract
The use of indium tin oxide (ITO) thin films as electrodes for integrated optical electrochemical sensor devices is discussed. The effect of various thicknesses of ITO overlayers exhibiting low resistivity and high transparency on potassium ion-exchanged waveguides fabricated in glass substrates is investigated over the wavelength range 500-900 nm. ITO overlayers are formed by reactive thermal evaporation in oxygen, followed by annealing in air to a maximum temperature of 320°C. With air as superstrate, losses in the waveguides were found to increase dramatically above 30nm ITO thickness for TE polarization, and above 50nm thickness for TM. Losses were increased over the whole wavelength range for a superstrate index close to that of water. A one-dimensional multilayer waveguide model is used in the interpretation of the experimental results.
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Published date: 1997
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Local EPrints ID: 78066
URI: http://eprints.soton.ac.uk/id/eprint/78066
ISSN: 0003-6935
PURE UUID: f1476a8a-d99b-4d7b-b247-7175460cf138
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Date deposited: 11 Mar 2010
Last modified: 14 Mar 2024 02:32
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Author:
B.Jonathan Luff
Author:
Guido Perrone
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