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Indium tin oxide overlayered waveguides for sensor applications

Indium tin oxide overlayered waveguides for sensor applications
Indium tin oxide overlayered waveguides for sensor applications
The use of indium tin oxide (ITO) thin films as electrodes for integrated optical electrochemical sensor devices is discussed. The effect of various thicknesses of ITO overlayers exhibiting low resistivity and high transparency on potassium ion-exchanged waveguides fabricated in glass substrates is investigated over the wavelength range 500-900 nm. ITO overlayers are formed by reactive thermal evaporation in oxygen, followed by annealing in air to a maximum temperature of 320°C. With air as superstrate, losses in the waveguides were found to increase dramatically above 30nm ITO thickness for TE polarization, and above 50nm thickness for TM. Losses were increased over the whole wavelength range for a superstrate index close to that of water. A one-dimensional multilayer waveguide model is used in the interpretation of the experimental results.
0003-6935
7066-7072
Luff, B.Jonathan
627665d3-1741-44e5-9994-7568ef2847a1
Wilkinson, James S.
73483cf3-d9f2-4688-9b09-1c84257884ca
Perrone, Guido
fe281dde-a2d9-4aa1-a7bd-6d76a78a22af
Luff, B.Jonathan
627665d3-1741-44e5-9994-7568ef2847a1
Wilkinson, James S.
73483cf3-d9f2-4688-9b09-1c84257884ca
Perrone, Guido
fe281dde-a2d9-4aa1-a7bd-6d76a78a22af

Luff, B.Jonathan, Wilkinson, James S. and Perrone, Guido (1997) Indium tin oxide overlayered waveguides for sensor applications. Applied Optics, 36 (27), 7066-7072. (doi:10.1364/AO.36.007066).

Record type: Article

Abstract

The use of indium tin oxide (ITO) thin films as electrodes for integrated optical electrochemical sensor devices is discussed. The effect of various thicknesses of ITO overlayers exhibiting low resistivity and high transparency on potassium ion-exchanged waveguides fabricated in glass substrates is investigated over the wavelength range 500-900 nm. ITO overlayers are formed by reactive thermal evaporation in oxygen, followed by annealing in air to a maximum temperature of 320°C. With air as superstrate, losses in the waveguides were found to increase dramatically above 30nm ITO thickness for TE polarization, and above 50nm thickness for TM. Losses were increased over the whole wavelength range for a superstrate index close to that of water. A one-dimensional multilayer waveguide model is used in the interpretation of the experimental results.

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Published date: 1997

Identifiers

Local EPrints ID: 78066
URI: http://eprints.soton.ac.uk/id/eprint/78066
ISSN: 0003-6935
PURE UUID: f1476a8a-d99b-4d7b-b247-7175460cf138
ORCID for James S. Wilkinson: ORCID iD orcid.org/0000-0003-4712-1697

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Date deposited: 11 Mar 2010
Last modified: 14 Mar 2024 02:32

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Contributors

Author: B.Jonathan Luff
Author: Guido Perrone

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