The University of Southampton
University of Southampton Institutional Repository

The effect of relative plasma plume delay on the properties of complex oxide films grown by multi-laser multi-target combinatorial pulsed laser deposition

The effect of relative plasma plume delay on the properties of complex oxide films grown by multi-laser multi-target combinatorial pulsed laser deposition
The effect of relative plasma plume delay on the properties of complex oxide films grown by multi-laser multi-target combinatorial pulsed laser deposition
We report the effects of relative time delay of plasma plumes on thin garnet crystal films fabricated by dual-beam, combinatorial pulsed laser deposition. Relative plume delay was found to affect both the lattice constant and elemental composition of mixed Gd3Ga5O12 (GGG) and Gd3Sc2Ga5O12 (GSGG) films. Further analysis of the plasmas was undertaken using a Langmuir probe, which revealed that for relative plume delays shorter than ~200 µs, the second plume travels through a partial vacuum created by the first plume, leading to higher energy ion bombardment of the growing film. The resulting in-plane stresses are consistent with the transition to a higher value of lattice constant normal to the film plane that was observed around this delay value. At delays shorter than ~10 µs, plume propagation was found to overlap, leading to scattering of lighter ions from the plume and a change in stoichiometry of the resultant films.
pulsed laser deposition, thin film, garnet crystal, langmuir probe, laser plasma, combinatorial
0169-4332
9066-9070
Sloyan, Katherine A.
5b66c8be-437e-467f-aeb0-5a742eea5abf
May-Smith, Timothy C.
47952bbd-ce28-4507-a723-b4d80bf0f809
Eason, Robert W.
e38684c3-d18c-41b9-a4aa-def67283b020
Lunney, James G.
a6038103-9c96-49e6-8af1-893740c47627
Sloyan, Katherine A.
5b66c8be-437e-467f-aeb0-5a742eea5abf
May-Smith, Timothy C.
47952bbd-ce28-4507-a723-b4d80bf0f809
Eason, Robert W.
e38684c3-d18c-41b9-a4aa-def67283b020
Lunney, James G.
a6038103-9c96-49e6-8af1-893740c47627

Sloyan, Katherine A., May-Smith, Timothy C., Eason, Robert W. and Lunney, James G. (2009) The effect of relative plasma plume delay on the properties of complex oxide films grown by multi-laser multi-target combinatorial pulsed laser deposition. Applied Surface Science, 255 (22), 9066-9070. (doi:10.1016/j.apsusc.2009.06.106).

Record type: Article

Abstract

We report the effects of relative time delay of plasma plumes on thin garnet crystal films fabricated by dual-beam, combinatorial pulsed laser deposition. Relative plume delay was found to affect both the lattice constant and elemental composition of mixed Gd3Ga5O12 (GGG) and Gd3Sc2Ga5O12 (GSGG) films. Further analysis of the plasmas was undertaken using a Langmuir probe, which revealed that for relative plume delays shorter than ~200 µs, the second plume travels through a partial vacuum created by the first plume, leading to higher energy ion bombardment of the growing film. The resulting in-plane stresses are consistent with the transition to a higher value of lattice constant normal to the film plane that was observed around this delay value. At delays shorter than ~10 µs, plume propagation was found to overlap, leading to scattering of lighter ions from the plume and a change in stoichiometry of the resultant films.

Text
4418.pdf - Accepted Manuscript
Download (266kB)

More information

Published date: 30 August 2009
Keywords: pulsed laser deposition, thin film, garnet crystal, langmuir probe, laser plasma, combinatorial

Identifiers

Local EPrints ID: 78903
URI: http://eprints.soton.ac.uk/id/eprint/78903
ISSN: 0169-4332
PURE UUID: e33d1016-809b-42b6-a3dc-f15d9bba8f3a
ORCID for Robert W. Eason: ORCID iD orcid.org/0000-0001-9704-2204

Catalogue record

Date deposited: 16 Mar 2010
Last modified: 13 Nov 2019 01:39

Export record

Altmetrics

Download statistics

Downloads from ePrints over the past year. Other digital versions may also be available to download e.g. from the publisher's website.

View more statistics

Atom RSS 1.0 RSS 2.0

Contact ePrints Soton: eprints@soton.ac.uk

ePrints Soton supports OAI 2.0 with a base URL of http://eprints.soton.ac.uk/cgi/oai2

This repository has been built using EPrints software, developed at the University of Southampton, but available to everyone to use.

We use cookies to ensure that we give you the best experience on our website. If you continue without changing your settings, we will assume that you are happy to receive cookies on the University of Southampton website.

×