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Focused ion beam etched ring-resonator in CVD-grown Ge-Sb-S thin films

Record type: Conference or Workshop Item (Paper)

Focused ion beam technique has been applied to fabricate ring resonators in Ge-Sb-S thin films for optoelectronic applications. The CVD-grown Ge-Sb-S thin films have been characterized by micro-Raman, scanning electron microscopy, energy dispersive X-ray analysis and UV-VIS-NIR spectroscopy and the properties of the resonator are being assessed

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Huang, C.C., Ho, Y.-L.D., Knight, K., Rarity, J.G. and Hewak, D.W. (2009) Focused ion beam etched ring-resonator in CVD-grown Ge-Sb-S thin films At CLEO Pacific Rim. 30 Aug - 03 Sep 2009.

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Published date: 30 August 2009
Venue - Dates: CLEO Pacific Rim, 2009-08-30 - 2009-09-03


Local EPrints ID: 78951
PURE UUID: 28eb9d42-7fc9-456d-9f5b-e3848b7108d4
ORCID for C.C. Huang: ORCID iD
ORCID for D.W. Hewak: ORCID iD

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Date deposited: 19 Mar 2010
Last modified: 18 Jul 2017 23:20

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Author: C.C. Huang ORCID iD
Author: Y.-L.D. Ho
Author: K. Knight
Author: J.G. Rarity
Author: D.W. Hewak ORCID iD

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