Gili, E., Uchino, T., Hakim, M.M.A., de Groot, C.H., Ashburn, P. and Hall, S. (2005) A new approach to the fabrication of CMOS compatible vertical MOSFETs incorporating a dielectric pocket. 6th International Conference on ULtimate Integration of Silicon (ULIS), Bologna, Bologna, Italy. 07 - 08 Apr 2005. 4 pp .
Record type:
Conference or Workshop Item
(Poster)
More information
Published date: April 2005
Additional Information:
Event Dates: 7-8 April
Venue - Dates:
6th International Conference on ULtimate Integration of Silicon (ULIS), Bologna, Bologna, Italy, 2005-04-07 - 2005-04-08
Organisations:
Nanoelectronics and Nanotechnology
Identifiers
Local EPrints ID: 260771
URI: http://eprints.soton.ac.uk/id/eprint/260771
PURE UUID: 25876f12-1880-42bb-83a0-8eec4afd2f40
Catalogue record
Date deposited: 15 Apr 2005
Last modified: 15 Mar 2024 03:11
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Contributors
Author:
E. Gili
Author:
T. Uchino
Author:
M.M.A. Hakim
Author:
P. Ashburn
Author:
S. Hall
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