Dynamics-level Design for Discrete- and Continuous-Time Band-pass Sigma-Delta-Modulators for Micro-machined Accelerometers


Luo, Jian, Rapisarda, Paolo and Kraft, Michael (2010) Dynamics-level Design for Discrete- and Continuous-Time Band-pass Sigma-Delta-Modulators for Micro-machined Accelerometers. In, MTNS 2010, Budapest, Hungary, 05 - 09 Jul 2010.

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Description/Abstract

High-performance micro-electro-mechanical systems (MEMS) sensors can be implemented by incorporating a micro-machined capacitive sensing element in a Sigma-Delta-Modulators force-feedback loop, forming an electro-mechanical Sigma-Delta Modulator (EM-SDM). We propose a transfer-function based design methodology to realize discrete- and continuous-time low-pass EM-SDM. The design is performed at the level of the integrated system consisting of the electro-mechanical sensor and of the electronic circuit; we call this the dynamics-level. We also illustrate a technique to perform the conversion of the discrete-time design to a continuous-time one. The approach is demonstrated through an EM-SDM design example for a bulk micro-machined, capacitive accelerometer.

Item Type: Conference or Workshop Item (Paper)
Additional Information: Event Dates: July 5-9, 2010
Divisions: Faculty of Physical Sciences and Engineering > Electronics and Computer Science > Comms, Signal Processing & Control
Faculty of Physical Sciences and Engineering > Electronics and Computer Science > NANO
ePrint ID: 271385
Date Deposited: 12 Jul 2010 12:11
Last Modified: 27 Mar 2014 20:16
Further Information:Google Scholar
URI: http://eprints.soton.ac.uk/id/eprint/271385

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