Design of an ultra-sensitive MEMS force sensor utilizing mode localization in weakly coupled resonators


Zhao, Chun, Graham, Wood, Suan-hui, Pu and Kraft, Michael (2012) Design of an ultra-sensitive MEMS force sensor utilizing mode localization in weakly coupled resonators. In, 23rd Micromechanics and Microsystems Europe Workshop, Ilmenau, DE, 09 - 12 Sep 2012.

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Item Type: Conference or Workshop Item (Paper)
Subjects: T Technology > TJ Mechanical engineering and machinery
Divisions: Faculty of Physical Sciences and Engineering > Electronics and Computer Science > NANO
ePrint ID: 343752
Date Deposited: 09 Oct 2012 14:19
Last Modified: 27 Mar 2014 20:25
Further Information:Google Scholar
URI: http://eprints.soton.ac.uk/id/eprint/343752

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