Design of an ultra-sensitive MEMS force sensor utilizing mode localization in weakly coupled resonators
Zhao, Chun, Graham, Wood, Suan-hui, Pu and Kraft, Michael (2012) Design of an ultra-sensitive MEMS force sensor utilizing mode localization in weakly coupled resonators. In, 23rd Micromechanics and Microsystems Europe Workshop, Ilmenau, DE, 09 - 12 Sep 2012.
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| Item Type: | Conference or Workshop Item (Paper) |
|---|---|
| Subjects: | T Technology > TJ Mechanical engineering and machinery |
| Divisions: | Faculty of Physical and Applied Science > Electronics and Computer Science > NANO |
| Item ID: | 343752 |
| Date Deposited: | 09 Oct 2012 14:19 |
| Last Modified: | 09 Oct 2012 14:19 |
| Contributors: | Zhao, Chun (Author) Graham, Wood (Author) Suan-hui, Pu (Author) Kraft, Michael (Author) |
| Date: | September 2012 |
| Status: | Unpublished |
| Further Information: | Google Scholar |
| URI: | http://eprints.soton.ac.uk/id/eprint/343752 |
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