Design of an ultra-sensitive MEMS force sensor utilizing mode localization in weakly coupled resonators


Zhao, Chun, Graham, Wood, Suan-hui, Pu and Kraft, Michael (2012) Design of an ultra-sensitive MEMS force sensor utilizing mode localization in weakly coupled resonators. In, 23rd Micromechanics and Microsystems Europe Workshop, Ilmenau, DE, 09 - 12 Sep 2012.

Download

[img]
Preview
PDF - Abstract
Download (471Kb)
Item Type: Conference or Workshop Item (Paper)
Subjects: T Technology > TJ Mechanical engineering and machinery
Divisions: Faculty of Physical Sciences and Engineering > Electronics and Computer Science > NANO
ePrint ID: 343752
Date Deposited: 09 Oct 2012 14:19
Last Modified: 27 Mar 2014 20:25
Further Information:Google Scholar
URI: http://eprints.soton.ac.uk/id/eprint/343752

Actions (login required)

View Item View Item

Downloads from ePrints over the past year. Other digital versions may also be available to download e.g. from the publisher's website.

View more statistics