DATASET - Integrated optical waveguides and inertial focussing microfluidics in silica for microflow cytometry applications

Abstract

A platform for microflow cytometry is presented comprising monolithically integrated waveguides and deep microfluidics in a rugged silica chip. Integrated waveguides deliver excitation light to an etched microfluidic channel and also collect transmitted light. The fluidics are designed to employ inertial focusing to reduce signal variation by bringing the flowing beads onto the same plane as the excitation light beam. A fabrication process is described which exploits microelectronics mass production techniques including: sputtering, ICP etching and PECVD. Test devices were fabricated and the effectiveness of inertial focusing of 5.6 µm fluorescent beads was studied showing lateral and vertical confinement of flowing beads within the microfluidic channel. The fluorescence signals from flowing calibration beads were quantified and a basic analysis of beads used in an immunoassay for TNF. was performed. Finally the potential of this type of device for measuring the variation in optical transmission from input to output waveguide as beads flowed through the beam was evaluated. Paper published in 'Integrated optical waveguides and inertial focussing microfluidics in silica for microflow cytometry applications'

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