Ultrasensitive mode-localized micromechanical electrometer
Ultrasensitive mode-localized micromechanical electrometer
We report a highly sensitive prototype micromechanical electrometer that employs the phenomena of mode-localization and curve veering for monitoring minute charge fluctuations across an input capacitor. The device consists of a pair of weakly coupled, nearly identical single crystal silicon, double-ended tuning fork (DETF) resonators. An addition of charge across an input capacitor on one of the coupled resonators induces a differential axial strain on that resonator relative to the other consequently perturbing the structural symmetry of the nearly periodic system. The resulting shifts in the eigenstates for the same magnitudes of charge input are theoretically and experimentally demonstrated to be nearly three orders of magnitude greater than corresponding resonant frequency variations. The topology chosen may also be adapted for force or strain monitoring thereby widening the relevance of the results reported here to precision inertial sensing as well.
91-96
Thiruvenkatanathan, Pradyumna
42613b52-d83d-4fa9-bc40-337201dfa2a0
Yan, Jize
786dc090-843b-435d-adbe-1d35e8fc5828
Seshia, A. Ashwin
674d2acc-6942-432d-9f32-e0d8fffcd36e
Thiruvenkatanathan, Pradyumna
42613b52-d83d-4fa9-bc40-337201dfa2a0
Yan, Jize
786dc090-843b-435d-adbe-1d35e8fc5828
Seshia, A. Ashwin
674d2acc-6942-432d-9f32-e0d8fffcd36e
Thiruvenkatanathan, Pradyumna, Yan, Jize and Seshia, A. Ashwin
(2010)
Ultrasensitive mode-localized micromechanical electrometer.
2010 IEEE International Frequency Control Symposium (FCS).
01 - 04 Jun 2010.
.
(doi:10.1109/FREQ.2010.5556368).
Record type:
Conference or Workshop Item
(Paper)
Abstract
We report a highly sensitive prototype micromechanical electrometer that employs the phenomena of mode-localization and curve veering for monitoring minute charge fluctuations across an input capacitor. The device consists of a pair of weakly coupled, nearly identical single crystal silicon, double-ended tuning fork (DETF) resonators. An addition of charge across an input capacitor on one of the coupled resonators induces a differential axial strain on that resonator relative to the other consequently perturbing the structural symmetry of the nearly periodic system. The resulting shifts in the eigenstates for the same magnitudes of charge input are theoretically and experimentally demonstrated to be nearly three orders of magnitude greater than corresponding resonant frequency variations. The topology chosen may also be adapted for force or strain monitoring thereby widening the relevance of the results reported here to precision inertial sensing as well.
Text
[29] IFCS 10 Prad.pdf
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e-pub ahead of print date: June 2010
Venue - Dates:
2010 IEEE International Frequency Control Symposium (FCS), 2010-06-01 - 2010-06-04
Organisations:
Nanoelectronics and Nanotechnology
Identifiers
Local EPrints ID: 398799
URI: http://eprints.soton.ac.uk/id/eprint/398799
PURE UUID: f22c37b8-e9c5-4879-9ac0-df53f5346edc
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Date deposited: 02 Aug 2016 12:54
Last modified: 15 Mar 2024 03:53
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Contributors
Author:
Pradyumna Thiruvenkatanathan
Author:
A. Ashwin Seshia
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