Design of an ultra-sensitive MEMS force sensor utilizing mode localization in weakly coupled resonators
Design of an ultra-sensitive MEMS force sensor utilizing mode localization in weakly coupled resonators
In this paper, the design of a novel ultrasensitive MEMS resonant force sensor utilizing a mode localization effect is presented. This new type of resonant sensor is constituted of several weakly coupled resonators and by measuring the amplitude ratio of designated resonators, a significant improvement in sensitivity is observed, compared to conventional frequency shift measurements. Furthermore, compared with conventional cantilever force sensors, the sensor is shown to be less constrained by the trade-off between sensitivity and stability along the axis of sensitivity, thus higher sensitivity and better stability can be achieved at the same time.
Zhao, Chun
00e81968-02a9-4b1c-8b63-97aa9fbfd4e9
Graham, Wood
61de1458-e7f5-4712-925a-a95bb44580ee
Pu, Suan-Hui
8b46b970-56fd-4a4e-8688-28668f648f43
Kraft, Michael
54927621-738f-4d40-af56-a027f686b59f
September 2012
Zhao, Chun
00e81968-02a9-4b1c-8b63-97aa9fbfd4e9
Graham, Wood
61de1458-e7f5-4712-925a-a95bb44580ee
Pu, Suan-Hui
8b46b970-56fd-4a4e-8688-28668f648f43
Kraft, Michael
54927621-738f-4d40-af56-a027f686b59f
Zhao, Chun, Graham, Wood, Pu, Suan-Hui and Kraft, Michael
(2012)
Design of an ultra-sensitive MEMS force sensor utilizing mode localization in weakly coupled resonators.
23rd Micromechanics and Microsystems Europe Workshop, Ilmenau, Germany.
09 - 12 Sep 2012.
4 pp
.
Record type:
Conference or Workshop Item
(Paper)
Abstract
In this paper, the design of a novel ultrasensitive MEMS resonant force sensor utilizing a mode localization effect is presented. This new type of resonant sensor is constituted of several weakly coupled resonators and by measuring the amplitude ratio of designated resonators, a significant improvement in sensitivity is observed, compared to conventional frequency shift measurements. Furthermore, compared with conventional cantilever force sensors, the sensor is shown to be less constrained by the trade-off between sensitivity and stability along the axis of sensitivity, thus higher sensitivity and better stability can be achieved at the same time.
More information
e-pub ahead of print date: September 2012
Published date: September 2012
Venue - Dates:
23rd Micromechanics and Microsystems Europe Workshop, Ilmenau, Germany, 2012-09-09 - 2012-09-12
Organisations:
Nanoelectronics and Nanotechnology, Engineering Science Unit
Identifiers
Local EPrints ID: 343752
URI: http://eprints.soton.ac.uk/id/eprint/343752
PURE UUID: e45791ee-ba9d-4d0a-bfb3-ecab7fabe9c0
Catalogue record
Date deposited: 09 Oct 2012 14:19
Last modified: 15 Mar 2024 04:02
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Contributors
Author:
Chun Zhao
Author:
Wood Graham
Author:
Michael Kraft
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