A simple interlocked controller for research vacuum systems
A simple interlocked controller for research vacuum systems
We describe a simple, low-cost circuit that we use to control and supervise
the operation of a radio-frequency plasma chamber. The unit has been
designed for flexibility and ease of construction, all control logic being
programmed into read-only memories. Feedback allows the unit to operate
as a state machine, offering a limited degree of control complexity without
the need for more than a simple EPROM programmer.
controller, interlock, vacuum apparatus
N43-N46
Freegarde, Tim
01a5f53b-d406-44fb-a166-d8da9128ea7d
Jessup, Jim
dec4ff63-1cc9-454f-9e72-c390a241befe
Hancock, Gus
8eef1378-045a-4e83-b0e9-a9059d465714
2001
Freegarde, Tim
01a5f53b-d406-44fb-a166-d8da9128ea7d
Jessup, Jim
dec4ff63-1cc9-454f-9e72-c390a241befe
Hancock, Gus
8eef1378-045a-4e83-b0e9-a9059d465714
Freegarde, Tim, Jessup, Jim and Hancock, Gus
(2001)
A simple interlocked controller for research vacuum systems.
Measurement Science and Technology, 12 (12), .
Abstract
We describe a simple, low-cost circuit that we use to control and supervise
the operation of a radio-frequency plasma chamber. The unit has been
designed for flexibility and ease of construction, all control logic being
programmed into read-only memories. Feedback allows the unit to operate
as a state machine, offering a limited degree of control complexity without
the need for more than a simple EPROM programmer.
More information
Published date: 2001
Keywords:
controller, interlock, vacuum apparatus
Identifiers
Local EPrints ID: 14828
URI: http://eprints.soton.ac.uk/id/eprint/14828
ISSN: 0957-0233
PURE UUID: c6449518-4ff8-4008-8421-38ec6e7c9d1d
Catalogue record
Date deposited: 04 Mar 2005
Last modified: 16 Mar 2024 03:35
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Contributors
Author:
Jim Jessup
Author:
Gus Hancock
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