Fabrication and test of thermal vertical bimorph actuators for movement in the wafer plane


(2000) Fabrication and test of thermal vertical bimorph actuators for movement in the wafer plane At MME2000

WarningThere is a more recent version of this item available.

Download

Full text not available from this repository.

Item Type: Conference or Workshop Item (Speech)
Additional Information: Event Dates: October 2000
ePrint ID: 259523
Date Deposited: 07 Feb 2005
Last Modified: 27 Mar 2014 20:02
Further Information:Google Scholar
URI: http://eprints.soton.ac.uk/id/eprint/259523

Available Versions of this Item

Actions (login required)

View Item View Item