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Modelling and analysis of a MEMS approach to dc voltage step-up conversion

Modelling and analysis of a MEMS approach to dc voltage step-up conversion
Modelling and analysis of a MEMS approach to dc voltage step-up conversion
This paper studies the principle of a novel voltage step-up converter based on a micromachined variable parallel-plate capacitor in combination with an electrostatic actuator. Electrical equivalent circuit and system-level SIMULINK models have been developed. Based on these models, an analysis of design parameters and expected device performance has been performed to serve as a starting point for a prototype implementation. Possible areas of application are self-powered, stand-alone sensing systems, aerospace applications and any kind of electrostatic or piezoelectric MEMS devices in general.
MEMS voltage conversion
S114-S122
Haas, Christoph H
ece06b20-e578-467a-8a91-d48585dc234a
Kraft, Michael
54927621-738f-4d40-af56-a027f686b59f
Haas, Christoph H
ece06b20-e578-467a-8a91-d48585dc234a
Kraft, Michael
54927621-738f-4d40-af56-a027f686b59f

Haas, Christoph H and Kraft, Michael (2004) Modelling and analysis of a MEMS approach to dc voltage step-up conversion. Journal of Micromech Microengineering, 14, No, S114-S122.

Record type: Article

Abstract

This paper studies the principle of a novel voltage step-up converter based on a micromachined variable parallel-plate capacitor in combination with an electrostatic actuator. Electrical equivalent circuit and system-level SIMULINK models have been developed. Based on these models, an analysis of design parameters and expected device performance has been performed to serve as a starting point for a prototype implementation. Possible areas of application are self-powered, stand-alone sensing systems, aerospace applications and any kind of electrostatic or piezoelectric MEMS devices in general.

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JMM_MEMS_dc-dc_converter_christoph.pdf - Other
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More information

Published date: September 2004
Keywords: MEMS voltage conversion
Organisations: Nanoelectronics and Nanotechnology

Identifiers

Local EPrints ID: 259907
URI: http://eprints.soton.ac.uk/id/eprint/259907
PURE UUID: 33112e0e-5f25-4fae-ba5c-4fd1260ca324

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Date deposited: 29 Oct 2004
Last modified: 14 Mar 2024 06:29

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Contributors

Author: Christoph H Haas
Author: Michael Kraft

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