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Modelling and analysis of a MEMS approach to dc voltage step-up conversion

Haas, Christoph H and Kraft, Michael (2004) Modelling and analysis of a MEMS approach to dc voltage step-up conversion Journal of Micromech Microengineering, 14, No, S114-S122.

Record type: Article


This paper studies the principle of a novel voltage step-up converter based on a micromachined variable parallel-plate capacitor in combination with an electrostatic actuator. Electrical equivalent circuit and system-level SIMULINK models have been developed. Based on these models, an analysis of design parameters and expected device performance has been performed to serve as a starting point for a prototype implementation. Possible areas of application are self-powered, stand-alone sensing systems, aerospace applications and any kind of electrostatic or piezoelectric MEMS devices in general.

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Published date: September 2004
Keywords: MEMS voltage conversion
Organisations: Nanoelectronics and Nanotechnology


Local EPrints ID: 259907
PURE UUID: 33112e0e-5f25-4fae-ba5c-4fd1260ca324

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Date deposited: 29 Oct 2004
Last modified: 18 Jul 2017 09:18

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Author: Christoph H Haas
Author: Michael Kraft

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