Design and Fabrication of Advanced Thermal Vertical Bimorph Actuators for Micropositioning


Sehr, H, Brunnschweiler, A, Evans, A, Ensell, G and Schabmueller, C (2002) Design and Fabrication of Advanced Thermal Vertical Bimorph Actuators for Micropositioning At MME2002, Romania. 06 - 08 Oct 2002.

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Item Type: Conference or Workshop Item (Other)
Additional Information: Event Dates: 6th-8th October 2002
Venue - Dates: MME2002, Romania, 2002-10-06 - 2002-10-08
Organisations: Nanoelectronics and Nanotechnology
ePrint ID: 260452
Date :
Date Event
2002Published
Date Deposited: 07 Feb 2005
Last Modified: 17 Apr 2017 22:14
Further Information:Google Scholar
URI: http://eprints.soton.ac.uk/id/eprint/260452

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