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Sehr, H, Brunnschweiler, A, Evans, A, Ensell, G and Niblock, T
(2001)
Fabrication and test of thermal vertical bimorph actuators for movement in the wafer plane.
Journal of Micromechanics and Microengineering, 11 (4), 306.
(doi:10.1088/0960-1317/11/4/303).
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