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Design and Fabrication of Advanced Thermal Vertical Bimorph Actuators for Micropositioning

Record type: Conference or Workshop Item (Other)

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Citation

Sehr, H, Brunnschweiler, A, Evans, A, Ensell, G and Schabmueller, C (2002) Design and Fabrication of Advanced Thermal Vertical Bimorph Actuators for Micropositioning At MME2002, Romania. 06 - 08 Oct 2002.

More information

Published date: 2002
Additional Information: Event Dates: 6th-8th October 2002
Venue - Dates: MME2002, Romania, 2002-10-06 - 2002-10-08
Organisations: Nanoelectronics and Nanotechnology

Identifiers

Local EPrints ID: 260452
URI: http://eprints.soton.ac.uk/id/eprint/260452
PURE UUID: c3b6613c-3d63-4a63-9b9b-0cb5fa0daec7

Catalogue record

Date deposited: 07 Feb 2005
Last modified: 18 Jul 2017 09:12

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Contributors

Author: H Sehr
Author: A Brunnschweiler
Author: A Evans
Author: G Ensell
Author: C Schabmueller

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