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A new approach to the fabrication of CMOS compatible vertical MOSFETs incorporating a dielectric pocket

A new approach to the fabrication of CMOS compatible vertical MOSFETs incorporating a dielectric pocket
A new approach to the fabrication of CMOS compatible vertical MOSFETs incorporating a dielectric pocket
Gili, E.
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Uchino, T.
706196b8-2f2c-403d-97aa-2995eac8572b
Hakim, M.M.A.
e584d902-b647-49eb-85bf-15446c06652a
de Groot, C.H.
92cd2e02-fcc4-43da-8816-c86f966be90c
Ashburn, P.
68cef6b7-205b-47aa-9efb-f1f09f5c1038
Hall, S.
a11a8f8b-d6fb-47a7-82b1-1f76d2f170dc
Gili, E.
6e227036-b8f4-4364-a0ce-28c3899294b8
Uchino, T.
706196b8-2f2c-403d-97aa-2995eac8572b
Hakim, M.M.A.
e584d902-b647-49eb-85bf-15446c06652a
de Groot, C.H.
92cd2e02-fcc4-43da-8816-c86f966be90c
Ashburn, P.
68cef6b7-205b-47aa-9efb-f1f09f5c1038
Hall, S.
a11a8f8b-d6fb-47a7-82b1-1f76d2f170dc

Gili, E., Uchino, T., Hakim, M.M.A., de Groot, C.H., Ashburn, P. and Hall, S. (2005) A new approach to the fabrication of CMOS compatible vertical MOSFETs incorporating a dielectric pocket. 6th International Conference on ULtimate Integration of Silicon (ULIS), Bologna, Italy. 07 - 08 Apr 2005. 4 pp .

Record type: Conference or Workshop Item (Poster)
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ULIS2005-EGili.pdf - Other
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More information

Published date: April 2005
Additional Information: Event Dates: 7-8 April
Venue - Dates: 6th International Conference on ULtimate Integration of Silicon (ULIS), Bologna, Italy, 2005-04-07 - 2005-04-08
Organisations: Nanoelectronics and Nanotechnology

Identifiers

Local EPrints ID: 260771
URI: https://eprints.soton.ac.uk/id/eprint/260771
PURE UUID: 25876f12-1880-42bb-83a0-8eec4afd2f40
ORCID for C.H. de Groot: ORCID iD orcid.org/0000-0002-3850-7101

Catalogue record

Date deposited: 15 Apr 2005
Last modified: 09 Jan 2019 01:35

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