The University of Southampton
University of Southampton Institutional Repository

The structural and electrical properties of thermally grown TiO2 thin films

The structural and electrical properties of thermally grown TiO2 thin films
The structural and electrical properties of thermally grown TiO2 thin films
We studied the structural and electrical properties of TiO2 thin films grown by thermal oxidation of e-beam evaporated Ti layers on Si substrates. Time of flight secondary ion mass spectroscopy (TOF-SIMS) was used to analyse the interfacial and chemical composition of the TiO2 thin films. Metal oxide semiconductor (MOS) capacitors with Pt or Al as the top electrode were fabricated to analyse electrical properties of the TiO2 thin films. We show that the reactivity of the Al top contact affects electrical properties of the oxide layers. The current transport mechanism in the TiO2 thin films is shown to be Poole–Frenkel (P–F) emission at room temperature. At 84 K, Fowler– Nordheim (F–N) tunnelling and trap-assisted tunnelling are observed. By comparing the electrical characteristics of thermally grown TiO2 thin films with the properties of those grown by other techniques reported in the literature, we suggest that, irrespective of the deposition technique, annealing of as-deposited TiO2 in O2 is a similar process to thermal oxidation of Ti thin films.
645-657
Chong, LH
395d641b-e092-4807-8bb3-d5084e1d5a28
Mallik, K
889c3785-fc5c-4f6c-a688-969caa0fdcfa
de Groot, CH
92cd2e02-fcc4-43da-8816-c86f966be90c
Kersting, R
16b401cb-eb62-4765-9f56-9b4b893cb395
Chong, LH
395d641b-e092-4807-8bb3-d5084e1d5a28
Mallik, K
889c3785-fc5c-4f6c-a688-969caa0fdcfa
de Groot, CH
92cd2e02-fcc4-43da-8816-c86f966be90c
Kersting, R
16b401cb-eb62-4765-9f56-9b4b893cb395

Chong, LH, Mallik, K, de Groot, CH and Kersting, R (2006) The structural and electrical properties of thermally grown TiO2 thin films. Journal of Physics: Condensed Matter, 18, 645-657.

Record type: Article

Abstract

We studied the structural and electrical properties of TiO2 thin films grown by thermal oxidation of e-beam evaporated Ti layers on Si substrates. Time of flight secondary ion mass spectroscopy (TOF-SIMS) was used to analyse the interfacial and chemical composition of the TiO2 thin films. Metal oxide semiconductor (MOS) capacitors with Pt or Al as the top electrode were fabricated to analyse electrical properties of the TiO2 thin films. We show that the reactivity of the Al top contact affects electrical properties of the oxide layers. The current transport mechanism in the TiO2 thin films is shown to be Poole–Frenkel (P–F) emission at room temperature. At 84 K, Fowler– Nordheim (F–N) tunnelling and trap-assisted tunnelling are observed. By comparing the electrical characteristics of thermally grown TiO2 thin films with the properties of those grown by other techniques reported in the literature, we suggest that, irrespective of the deposition technique, annealing of as-deposited TiO2 in O2 is a similar process to thermal oxidation of Ti thin films.

PDF
chong645.pdf - Other
Download (382kB)

More information

Published date: February 2006
Organisations: Nanoelectronics and Nanotechnology

Identifiers

Local EPrints ID: 262095
URI: https://eprints.soton.ac.uk/id/eprint/262095
PURE UUID: 8f36c1ff-c284-406f-9769-33e2ea1545c2
ORCID for CH de Groot: ORCID iD orcid.org/0000-0002-3850-7101

Catalogue record

Date deposited: 21 Mar 2006
Last modified: 06 Jun 2018 12:50

Export record

Contributors

Author: LH Chong
Author: K Mallik
Author: CH de Groot ORCID iD
Author: R Kersting

University divisions

Download statistics

Downloads from ePrints over the past year. Other digital versions may also be available to download e.g. from the publisher's website.

View more statistics

Atom RSS 1.0 RSS 2.0

Contact ePrints Soton: eprints@soton.ac.uk

ePrints Soton supports OAI 2.0 with a base URL of https://eprints.soton.ac.uk/cgi/oai2

This repository has been built using EPrints software, developed at the University of Southampton, but available to everyone to use.

We use cookies to ensure that we give you the best experience on our website. If you continue without changing your settings, we will assume that you are happy to receive cookies on the University of Southampton website.

×