Thick-Film Actuation Technologies For MEMS Applications
Thick-Film Actuation Technologies For MEMS Applications
This paper compares two thick-film actuation technologies and assesses their suitability for use within micromachined devices. The materials are a piezoelectric composition, which exhibits a d33 coefficient of the order of 130pC/N, and a magnetostrictive material which possess a magnetostriction of 4.4ppm at a magnetic field of 11.5kA/m. Examples of their application in micromachined devices are also given.
Thick-Film Piezoelectric Magnetostrictive
085432 848 3
61-64
Grabham, Neil
00695728-6280-4d06-a943-29142f2547c9
Torah, Russel
7147b47b-db01-4124-95dc-90d6a9842688
Beeby, Steve
ba565001-2812-4300-89f1-fe5a437ecb0d
Harris, Nick
237cfdbd-86e4-4025-869c-c85136f14dfd
White, Neil
c7be4c26-e419-4e5c-9420-09fc02e2ac9c
2006
Grabham, Neil
00695728-6280-4d06-a943-29142f2547c9
Torah, Russel
7147b47b-db01-4124-95dc-90d6a9842688
Beeby, Steve
ba565001-2812-4300-89f1-fe5a437ecb0d
Harris, Nick
237cfdbd-86e4-4025-869c-c85136f14dfd
White, Neil
c7be4c26-e419-4e5c-9420-09fc02e2ac9c
Grabham, Neil, Torah, Russel, Beeby, Steve, Harris, Nick and White, Neil
(2006)
Thick-Film Actuation Technologies For MEMS Applications.
17th MicroMechanics Workshop Europe (MME06), Southampton, UK, United Kingdom.
03 - 05 Sep 2006.
.
Record type:
Conference or Workshop Item
(Paper)
Abstract
This paper compares two thick-film actuation technologies and assesses their suitability for use within micromachined devices. The materials are a piezoelectric composition, which exhibits a d33 coefficient of the order of 130pC/N, and a magnetostrictive material which possess a magnetostriction of 4.4ppm at a magnetic field of 11.5kA/m. Examples of their application in micromachined devices are also given.
More information
Published date: 2006
Additional Information:
Event Dates: 3rd-5th September 2006
Venue - Dates:
17th MicroMechanics Workshop Europe (MME06), Southampton, UK, United Kingdom, 2006-09-03 - 2006-09-05
Keywords:
Thick-Film Piezoelectric Magnetostrictive
Organisations:
EEE
Identifiers
Local EPrints ID: 262964
URI: http://eprints.soton.ac.uk/id/eprint/262964
ISBN: 085432 848 3
PURE UUID: d13fa2c5-c974-42d5-abe7-62aac21e69ee
Catalogue record
Date deposited: 15 Sep 2006
Last modified: 07 Dec 2024 02:40
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Contributors
Author:
Neil Grabham
Author:
Russel Torah
Author:
Steve Beeby
Author:
Nick Harris
Author:
Neil White
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