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Thick-Film Actuation Technologies For MEMS Applications

Grabham, Neil, Torah, Russel, Beeby, Steve, Harris, Nick and White, Neil (2006) Thick-Film Actuation Technologies For MEMS Applications At 17th MicroMechanics Europe Workshop, United Kingdom. 03 - 05 Sep 2006. , pp. 61-64.

Record type: Conference or Workshop Item (Paper)


This paper compares two thick-film actuation technologies and assesses their suitability for use within micromachined devices. The materials are a piezoelectric composition, which exhibits a d33 coefficient of the order of 130pC/N, and a magnetostrictive material which possess a magnetostriction of 4.4ppm at a magnetic field of 11.5kA/m. Examples of their application in micromachined devices are also given.

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Published date: 2006
Additional Information: Event Dates: 3rd-5th September 2006
Venue - Dates: 17th MicroMechanics Europe Workshop, United Kingdom, 2006-09-03 - 2006-09-05
Keywords: Thick-Film Piezoelectric Magnetostrictive
Organisations: EEE


Local EPrints ID: 262964
ISBN: 085432 848 3
PURE UUID: d13fa2c5-c974-42d5-abe7-62aac21e69ee
ORCID for Steve Beeby: ORCID iD
ORCID for Nick Harris: ORCID iD
ORCID for Neil White: ORCID iD

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Date deposited: 15 Sep 2006
Last modified: 18 Jul 2017 08:46

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Author: Neil Grabham
Author: Russel Torah
Author: Steve Beeby ORCID iD
Author: Nick Harris ORCID iD
Author: Neil White ORCID iD

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