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Thick-Film Actuation Technologies For MEMS Applications

Thick-Film Actuation Technologies For MEMS Applications
Thick-Film Actuation Technologies For MEMS Applications
This paper compares two thick-film actuation technologies and assesses their suitability for use within micromachined devices. The materials are a piezoelectric composition, which exhibits a d33 coefficient of the order of 130pC/N, and a magnetostrictive material which possess a magnetostriction of 4.4ppm at a magnetic field of 11.5kA/m. Examples of their application in micromachined devices are also given.
Thick-Film Piezoelectric Magnetostrictive
085432 848 3
61-64
Grabham, Neil
00695728-6280-4d06-a943-29142f2547c9
Torah, Russel
7147b47b-db01-4124-95dc-90d6a9842688
Beeby, Steve
ba565001-2812-4300-89f1-fe5a437ecb0d
Harris, Nick
237cfdbd-86e4-4025-869c-c85136f14dfd
White, Neil
c7be4c26-e419-4e5c-9420-09fc02e2ac9c
Grabham, Neil
00695728-6280-4d06-a943-29142f2547c9
Torah, Russel
7147b47b-db01-4124-95dc-90d6a9842688
Beeby, Steve
ba565001-2812-4300-89f1-fe5a437ecb0d
Harris, Nick
237cfdbd-86e4-4025-869c-c85136f14dfd
White, Neil
c7be4c26-e419-4e5c-9420-09fc02e2ac9c

Grabham, Neil, Torah, Russel, Beeby, Steve, Harris, Nick and White, Neil (2006) Thick-Film Actuation Technologies For MEMS Applications. 17th MicroMechanics Workshop Europe (MME06), Southampton, UK, United Kingdom. 03 - 05 Sep 2006. pp. 61-64 .

Record type: Conference or Workshop Item (Paper)

Abstract

This paper compares two thick-film actuation technologies and assesses their suitability for use within micromachined devices. The materials are a piezoelectric composition, which exhibits a d33 coefficient of the order of 130pC/N, and a magnetostrictive material which possess a magnetostriction of 4.4ppm at a magnetic field of 11.5kA/m. Examples of their application in micromachined devices are also given.

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More information

Published date: 2006
Additional Information: Event Dates: 3rd-5th September 2006
Venue - Dates: 17th MicroMechanics Workshop Europe (MME06), Southampton, UK, United Kingdom, 2006-09-03 - 2006-09-05
Keywords: Thick-Film Piezoelectric Magnetostrictive
Organisations: EEE

Identifiers

Local EPrints ID: 262964
URI: http://eprints.soton.ac.uk/id/eprint/262964
ISBN: 085432 848 3
PURE UUID: d13fa2c5-c974-42d5-abe7-62aac21e69ee
ORCID for Neil Grabham: ORCID iD orcid.org/0000-0002-6385-0331
ORCID for Russel Torah: ORCID iD orcid.org/0000-0002-5598-2860
ORCID for Steve Beeby: ORCID iD orcid.org/0000-0002-0800-1759
ORCID for Nick Harris: ORCID iD orcid.org/0000-0003-4122-2219
ORCID for Neil White: ORCID iD orcid.org/0000-0003-1532-6452

Catalogue record

Date deposited: 15 Sep 2006
Last modified: 15 Mar 2024 03:20

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Contributors

Author: Neil Grabham ORCID iD
Author: Russel Torah ORCID iD
Author: Steve Beeby ORCID iD
Author: Nick Harris ORCID iD
Author: Neil White ORCID iD

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