The University of Southampton
University of Southampton Institutional Repository

Thick-Film Actuation Technologies For MEMS Applications

Thick-Film Actuation Technologies For MEMS Applications
Thick-Film Actuation Technologies For MEMS Applications
This paper compares two thick-film actuation technologies and assesses their suitability for use within micromachined devices. The materials are a piezoelectric composition, which exhibits a d33 coefficient of the order of 130pC/N, and a magnetostrictive material which possess a magnetostriction of 4.4ppm at a magnetic field of 11.5kA/m. Examples of their application in micromachined devices are also given.
Thick-Film Piezoelectric Magnetostrictive
085432 848 3
61-64
Grabham, Neil
00695728-6280-4d06-a943-29142f2547c9
Torah, Russel
7147b47b-db01-4124-95dc-90d6a9842688
Beeby, Steve
ba565001-2812-4300-89f1-fe5a437ecb0d
Harris, Nick
237cfdbd-86e4-4025-869c-c85136f14dfd
White, Neil
c7be4c26-e419-4e5c-9420-09fc02e2ac9c
Grabham, Neil
00695728-6280-4d06-a943-29142f2547c9
Torah, Russel
7147b47b-db01-4124-95dc-90d6a9842688
Beeby, Steve
ba565001-2812-4300-89f1-fe5a437ecb0d
Harris, Nick
237cfdbd-86e4-4025-869c-c85136f14dfd
White, Neil
c7be4c26-e419-4e5c-9420-09fc02e2ac9c

Grabham, Neil, Torah, Russel, Beeby, Steve, Harris, Nick and White, Neil (2006) Thick-Film Actuation Technologies For MEMS Applications At 17th MicroMechanics Europe Workshop, United Kingdom. 03 - 05 Sep 2006. , pp. 61-64.

Record type: Conference or Workshop Item (Paper)

Abstract

This paper compares two thick-film actuation technologies and assesses their suitability for use within micromachined devices. The materials are a piezoelectric composition, which exhibits a d33 coefficient of the order of 130pC/N, and a magnetostrictive material which possess a magnetostriction of 4.4ppm at a magnetic field of 11.5kA/m. Examples of their application in micromachined devices are also given.

PDF Paper.pdf - Other
Download (85kB)

More information

Published date: 2006
Additional Information: Event Dates: 3rd-5th September 2006
Venue - Dates: 17th MicroMechanics Europe Workshop, United Kingdom, 2006-09-03 - 2006-09-05
Keywords: Thick-Film Piezoelectric Magnetostrictive
Organisations: EEE

Identifiers

Local EPrints ID: 262964
URI: http://eprints.soton.ac.uk/id/eprint/262964
ISBN: 085432 848 3
PURE UUID: d13fa2c5-c974-42d5-abe7-62aac21e69ee
ORCID for Neil Grabham: ORCID iD orcid.org/0000-0002-6385-0331
ORCID for Steve Beeby: ORCID iD orcid.org/0000-0002-0800-1759
ORCID for Nick Harris: ORCID iD orcid.org/0000-0003-4122-2219
ORCID for Neil White: ORCID iD orcid.org/0000-0003-1532-6452

Catalogue record

Date deposited: 15 Sep 2006
Last modified: 18 Jul 2017 08:46

Export record

Contributors

Author: Neil Grabham ORCID iD
Author: Russel Torah
Author: Steve Beeby ORCID iD
Author: Nick Harris ORCID iD
Author: Neil White ORCID iD

University divisions

Download statistics

Downloads from ePrints over the past year. Other digital versions may also be available to download e.g. from the publisher's website.

View more statistics

Atom RSS 1.0 RSS 2.0

Contact ePrints Soton: eprints@soton.ac.uk

ePrints Soton supports OAI 2.0 with a base URL of http://eprints.soton.ac.uk/cgi/oai2

This repository has been built using EPrints software, developed at the University of Southampton, but available to everyone to use.

We use cookies to ensure that we give you the best experience on our website. If you continue without changing your settings, we will assume that you are happy to receive cookies on the University of Southampton website.

×