Functional silicon nanoelectromechanical information processing devices
Functional silicon nanoelectromechanical information processing devices
pp 65-86
Mizuta, Hiroshi
f14d5ffc-751b-472b-8dba-c8518c6840b9
Tsuchiya, Yoshishige
5a5178c6-b3a9-4e07-b9b2-9a28e49f1dc2
Oda, S.
4a88f225-39f6-4c89-a9da-8c35fbfe6fde
August 2007
Mizuta, Hiroshi
f14d5ffc-751b-472b-8dba-c8518c6840b9
Tsuchiya, Yoshishige
5a5178c6-b3a9-4e07-b9b2-9a28e49f1dc2
Oda, S.
4a88f225-39f6-4c89-a9da-8c35fbfe6fde
Mizuta, Hiroshi, Tsuchiya, Yoshishige and Oda, S.
(2007)
Functional silicon nanoelectromechanical information processing devices.
Frontier Process Workshop 2007, Tsukuba.
.
Record type:
Conference or Workshop Item
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cpaper_139.pdf
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More information
Published date: August 2007
Additional Information:
(Invited talk) Event Dates: August 2007
Venue - Dates:
Frontier Process Workshop 2007, Tsukuba, 2007-08-01
Organisations:
Nanoelectronics and Nanotechnology
Identifiers
Local EPrints ID: 266277
URI: http://eprints.soton.ac.uk/id/eprint/266277
PURE UUID: 2e6873a5-2e89-423b-837e-ba9847fc2133
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Date deposited: 23 Jul 2008 09:31
Last modified: 14 Mar 2024 08:24
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Contributors
Author:
Hiroshi Mizuta
Author:
Yoshishige Tsuchiya
Author:
S. Oda
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