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Functional silicon nanoelectromechanical information processing devices

Mizuta, Hiroshi, Tsuchiya, Yoshishige and Oda, S. (2007) Functional silicon nanoelectromechanical information processing devices At Frontier Process Workshop 2007. , pp 65-86.

Record type: Conference or Workshop Item (Other)
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Published date: August 2007
Additional Information: (Invited talk) Event Dates: August 2007
Venue - Dates: Frontier Process Workshop 2007, 2007-08-01
Organisations: Nanoelectronics and Nanotechnology


Local EPrints ID: 266277
PURE UUID: 2e6873a5-2e89-423b-837e-ba9847fc2133

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Date deposited: 23 Jul 2008 09:31
Last modified: 18 Jul 2017 07:18

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Author: Hiroshi Mizuta
Author: Yoshishige Tsuchiya
Author: S. Oda

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