Dynamics-level Design for Discrete- and Continuous-Time Band-pass Sigma-Delta-Modulators for Micro-machined Accelerometers
Dynamics-level Design for Discrete- and Continuous-Time Band-pass Sigma-Delta-Modulators for Micro-machined Accelerometers
High-performance micro-electro-mechanical systems (MEMS) sensors can be implemented by incorporating a micro-machined capacitive sensing element in a Sigma-Delta-Modulators force-feedback loop, forming an electro-mechanical Sigma-Delta Modulator (EM-SDM). We propose a transfer-function based design methodology to realize discrete- and continuous-time low-pass EM-SDM. The design is performed at the level of the integrated system consisting of the electro-mechanical sensor and of the electronic circuit; we call this the dynamics-level. We also illustrate a technique to perform the conversion of the discrete-time design to a continuous-time one. The approach is demonstrated through an EM-SDM design example for a bulk micro-machined, capacitive accelerometer.
Luo, Jian
6538d6e8-3f74-4ab3-aabd-89f6014276d9
Rapisarda, Paolo
79efc3b0-a7c6-4ca7-a7f8-de5770a4281b
Kraft, Michael
54927621-738f-4d40-af56-a027f686b59f
6 July 2010
Luo, Jian
6538d6e8-3f74-4ab3-aabd-89f6014276d9
Rapisarda, Paolo
79efc3b0-a7c6-4ca7-a7f8-de5770a4281b
Kraft, Michael
54927621-738f-4d40-af56-a027f686b59f
Luo, Jian, Rapisarda, Paolo and Kraft, Michael
(2010)
Dynamics-level Design for Discrete- and Continuous-Time Band-pass Sigma-Delta-Modulators for Micro-machined Accelerometers.
MTNS 2010, Budapest, Hungary.
05 - 09 Jul 2010.
Record type:
Conference or Workshop Item
(Paper)
Abstract
High-performance micro-electro-mechanical systems (MEMS) sensors can be implemented by incorporating a micro-machined capacitive sensing element in a Sigma-Delta-Modulators force-feedback loop, forming an electro-mechanical Sigma-Delta Modulator (EM-SDM). We propose a transfer-function based design methodology to realize discrete- and continuous-time low-pass EM-SDM. The design is performed at the level of the integrated system consisting of the electro-mechanical sensor and of the electronic circuit; we call this the dynamics-level. We also illustrate a technique to perform the conversion of the discrete-time design to a continuous-time one. The approach is demonstrated through an EM-SDM design example for a bulk micro-machined, capacitive accelerometer.
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Published date: 6 July 2010
Additional Information:
Event Dates: July 5-9, 2010
Venue - Dates:
MTNS 2010, Budapest, Hungary, 2010-07-05 - 2010-07-09
Organisations:
Nanoelectronics and Nanotechnology, Southampton Wireless Group
Identifiers
Local EPrints ID: 271385
URI: http://eprints.soton.ac.uk/id/eprint/271385
PURE UUID: b9f7e84c-329f-43b5-8b2d-d9560217872f
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Date deposited: 12 Jul 2010 12:11
Last modified: 14 Mar 2024 09:30
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Contributors
Author:
Jian Luo
Author:
Paolo Rapisarda
Author:
Michael Kraft
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