The University of Southampton
University of Southampton Institutional Repository

Improved sub-threshold slope in short channel vertical MOSFETs using FILOX oxidation

Hakim, M M A, Tan, L., Buiu, O., Redman-White, W., Hall, S. and Ashburn, P (2009) Improved sub-threshold slope in short channel vertical MOSFETs using FILOX oxidation Solid State Electronics, 53, (7), pp. 753-759. (doi:10.1016/j.sse.2009.02.016).

Record type: Article

Abstract

This paper investigates the origins of sub-threshold slope degradation in vertical MOSFETs (v-MOSFETs) due to dry etching of the polysilicon surround gate. Control v-MOSFETs exhibit a degradation of sub-threshold slope as the channel length is reduced from 250 to 100 nm, with 100 nm transistors having a value of 125 mV/dec and a DIBL of 210 mV/V. The effect of the polysilicon gate etch is investigated using a frame-gate architecture in which the polysilicon gate overlaps the side of the pillar, thereby protecting the channel from etch damage. This device shows no degradation of short channel effects when the channel length is scaled and exhibits a near-ideal sub-threshold slope of 76 mV/dec and a DIBL of 33 mV/V at a channel length of 100 nm. Gated diode measurements unambiguously demonstrate that this improved sub-threshold slope is due to the elimination of etch damage at the top and bottom of the pillar created during polysilicon gate etch. An alternative method of eliminating dry etch damage is then investigated by optimizing the Fillet Local Oxidation (FILOX). These devices give a sub-threshold slope of 81 mV/dec and a DIBL of 25 mV/V at a channel length of 100 nm. The improved immunity to dry etch damage is due to the creation of a thick protective oxide at the top and bottom of the pillar during the FILOX process

PDF hakim753.pdf - Other
Download (1MB)

More information

Published date: July 2009
Organisations: Nanoelectronics and Nanotechnology

Identifiers

Local EPrints ID: 272584
URI: http://eprints.soton.ac.uk/id/eprint/272584
ISSN: 0038-1101
PURE UUID: f7f8b2df-10eb-41d7-b33e-d234c27568d2

Catalogue record

Date deposited: 20 Jul 2011 00:12
Last modified: 18 Jul 2017 06:22

Export record

Altmetrics

Contributors

Author: M M A Hakim
Author: L. Tan
Author: O. Buiu
Author: W. Redman-White
Author: S. Hall
Author: P Ashburn

University divisions

Download statistics

Downloads from ePrints over the past year. Other digital versions may also be available to download e.g. from the publisher's website.

View more statistics

Atom RSS 1.0 RSS 2.0

Contact ePrints Soton: eprints@soton.ac.uk

ePrints Soton supports OAI 2.0 with a base URL of http://eprints.soton.ac.uk/cgi/oai2

This repository has been built using EPrints software, developed at the University of Southampton, but available to everyone to use.

We use cookies to ensure that we give you the best experience on our website. If you continue without changing your settings, we will assume that you are happy to receive cookies on the University of Southampton website.

×