Husain, Muhammad, Lin, Yun, Alkhalil, Feras, Chong, Harold, Tsuchiya, Yoshishige, Lambert, Nicholas, Ferguson, Andrew and Mizuta, Hiroshi (2011) Fabrication of Silicon-based single spin quantum devices using Hydrogen silsesquioxane electron beam resist. The 37th International Conference on Micro and Nano Engineering, Berlin, Germany. 19 - 23 Sep 2011.
Record type:
Conference or Workshop Item
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Published date: 19 September 2011
Additional Information:
Event Dates: September 19-23, 2011
Venue - Dates:
The 37th International Conference on Micro and Nano Engineering, Berlin, Germany, 2011-09-19 - 2011-09-23
Organisations:
Nanoelectronics and Nanotechnology
Identifiers
Local EPrints ID: 272665
URI: http://eprints.soton.ac.uk/id/eprint/272665
PURE UUID: 1fae07d0-a841-4ca1-9450-cec4af77c65a
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Date deposited: 14 Aug 2011 11:35
Last modified: 15 Mar 2024 03:30
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Contributors
Author:
Muhammad Husain
Author:
Yun Lin
Author:
Feras Alkhalil
Author:
Harold Chong
Author:
Yoshishige Tsuchiya
Author:
Nicholas Lambert
Author:
Andrew Ferguson
Author:
Hiroshi Mizuta
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