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Fabrication of Silicon-based single spin quantum devices using Hydrogen silsesquioxane electron beam resist

Fabrication of Silicon-based single spin quantum devices using Hydrogen silsesquioxane electron beam resist
Fabrication of Silicon-based single spin quantum devices using Hydrogen silsesquioxane electron beam resist
Husain, Muhammad
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Lin, Yun
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Alkhalil, Feras
69c44665-fdf5-4043-a47a-97578d9c31a1
Chong, Harold
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Tsuchiya, Yoshishige
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Lambert, Nicholas
bd12ad6e-1b76-4f0a-9db5-ec93193cd032
Ferguson, Andrew
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Mizuta, Hiroshi
f14d5ffc-751b-472b-8dba-c8518c6840b9
Husain, Muhammad
92db1f76-6760-4cf2-8e30-5d4a602fe15b
Lin, Yun
3cbd9eaf-53ac-4bea-9f83-91b5870b52f4
Alkhalil, Feras
69c44665-fdf5-4043-a47a-97578d9c31a1
Chong, Harold
795aa67f-29e5-480f-b1bc-9bd5c0d558e1
Tsuchiya, Yoshishige
5a5178c6-b3a9-4e07-b9b2-9a28e49f1dc2
Lambert, Nicholas
bd12ad6e-1b76-4f0a-9db5-ec93193cd032
Ferguson, Andrew
46790ed1-6756-4aa8-9d9f-72923b0d59ae
Mizuta, Hiroshi
f14d5ffc-751b-472b-8dba-c8518c6840b9

Husain, Muhammad, Lin, Yun, Alkhalil, Feras, Chong, Harold, Tsuchiya, Yoshishige, Lambert, Nicholas, Ferguson, Andrew and Mizuta, Hiroshi (2011) Fabrication of Silicon-based single spin quantum devices using Hydrogen silsesquioxane electron beam resist. The 37th International Conference on Micro and Nano Engineering, Germany. 19 - 23 Sep 2011.

Record type: Conference or Workshop Item (Other)
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MNE_2011_ABSTRACT.pdf - Other
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More information

Published date: 19 September 2011
Additional Information: Event Dates: September 19-23, 2011
Venue - Dates: The 37th International Conference on Micro and Nano Engineering, Germany, 2011-09-19 - 2011-09-23
Organisations: Nanoelectronics and Nanotechnology

Identifiers

Local EPrints ID: 272665
URI: https://eprints.soton.ac.uk/id/eprint/272665
PURE UUID: 1fae07d0-a841-4ca1-9450-cec4af77c65a
ORCID for Harold Chong: ORCID iD orcid.org/0000-0002-7110-5761

Catalogue record

Date deposited: 14 Aug 2011 11:35
Last modified: 06 Jun 2018 12:37

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Contributors

Author: Muhammad Husain
Author: Yun Lin
Author: Feras Alkhalil
Author: Harold Chong ORCID iD
Author: Yoshishige Tsuchiya
Author: Nicholas Lambert
Author: Andrew Ferguson
Author: Hiroshi Mizuta

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