Design of an ultra-sensitive MEMS force sensor utilizing mode localization in weakly coupled resonators


Zhao, Chun, Graham, Wood, Pu, Suan-Hui and Kraft, Michael (2012) Design of an ultra-sensitive MEMS force sensor utilizing mode localization in weakly coupled resonators At 23rd Micromechanics and Microsystems Europe Workshop, Germany. 09 - 12 Sep 2012. 4 pp.

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Description/Abstract

In this paper, the design of a novel ultrasensitive MEMS resonant force sensor utilizing a mode localization effect is presented. This new type of resonant sensor is constituted of several weakly coupled resonators and by measuring the amplitude ratio of designated resonators, a significant improvement in sensitivity is observed, compared to conventional frequency shift measurements. Furthermore, compared with conventional cantilever force sensors, the sensor is shown to be less constrained by the trade-off between sensitivity and stability along the axis of sensitivity, thus higher sensitivity and better stability can be achieved at the same time.

Item Type: Conference or Workshop Item (Paper)
Venue - Dates: 23rd Micromechanics and Microsystems Europe Workshop, Germany, 2012-09-09 - 2012-09-12
Subjects:
Organisations: Nanoelectronics and Nanotechnology, Engineering Science Unit
ePrint ID: 343752
Date :
Date Event
September 2012e-pub ahead of print
September 2012Published
Date Deposited: 09 Oct 2012 14:19
Last Modified: 17 Apr 2017 16:32
Further Information:Google Scholar
URI: http://eprints.soton.ac.uk/id/eprint/343752

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