Zhao, Chun, Graham, Wood, Pu, Suan-Hui and Kraft, Michael
Design of an ultra-sensitive MEMS force sensor utilizing mode localization in weakly coupled resonators
At 23rd Micromechanics and Microsystems Europe Workshop, Germany.
09 - 12 Sep 2012.
In this paper, the design of a novel ultrasensitive MEMS resonant force sensor utilizing a mode localization effect is presented. This new type of resonant sensor is constituted of several weakly coupled resonators and by measuring the amplitude ratio of designated resonators, a significant improvement in sensitivity is observed, compared to conventional frequency shift measurements. Furthermore, compared with conventional cantilever force sensors, the sensor is shown to be less constrained by the trade-off between sensitivity and stability along the axis of sensitivity, thus higher sensitivity and better stability can be achieved at the same time.
Conference or Workshop Item
|Venue - Dates:
||23rd Micromechanics and Microsystems Europe Workshop, Germany, 2012-09-09 - 2012-09-12
||Nanoelectronics and Nanotechnology, Engineering Science Unit
|September 2012||e-pub ahead of print|
||09 Oct 2012 14:19
||17 Apr 2017 16:32
|Further Information:||Google Scholar|
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