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Design of an ultra-sensitive MEMS force sensor utilizing mode localization in weakly coupled resonators

Zhao, Chun, Graham, Wood, Pu, Suan-Hui and Kraft, Michael (2012) Design of an ultra-sensitive MEMS force sensor utilizing mode localization in weakly coupled resonators At 23rd Micromechanics and Microsystems Europe Workshop, Germany. 09 - 12 Sep 2012. 4 pp.

Record type: Conference or Workshop Item (Paper)


In this paper, the design of a novel ultrasensitive MEMS resonant force sensor utilizing a mode localization effect is presented. This new type of resonant sensor is constituted of several weakly coupled resonators and by measuring the amplitude ratio of designated resonators, a significant improvement in sensitivity is observed, compared to conventional frequency shift measurements. Furthermore, compared with conventional cantilever force sensors, the sensor is shown to be less constrained by the trade-off between sensitivity and stability along the axis of sensitivity, thus higher sensitivity and better stability can be achieved at the same time.

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e-pub ahead of print date: September 2012
Published date: September 2012
Venue - Dates: 23rd Micromechanics and Microsystems Europe Workshop, Germany, 2012-09-09 - 2012-09-12
Organisations: Nanoelectronics and Nanotechnology, Engineering Science Unit


Local EPrints ID: 343752
PURE UUID: e45791ee-ba9d-4d0a-bfb3-ecab7fabe9c0

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Date deposited: 09 Oct 2012 14:19
Last modified: 18 Jul 2017 05:20

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Author: Chun Zhao
Author: Wood Graham
Author: Suan-Hui Pu
Author: Michael Kraft

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