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EUV off-axis focusing using a high harmonic source

EUV off-axis focusing using a high harmonic source
EUV off-axis focusing using a high harmonic source
High Harmonic Generation is a well established technique for generating Extreme Ultraviolet radiation. It is a promising technique for both structure and spectroscopic imaging due to both the high flux and coherence of the source, and the existence of multiple absorption edges at the generated wavelengths. To increase the flux, a focussing device can be used. Here we present focussing results for a Mo/Si spherical mirror that has been used in an off-axis arrangement, and give extensive analysis of the resulting astigmatic focus and its consequence on diffractive imaging. The astigmatic beam exists as a vertical and horizontal focus, separated by a circle of least confusion. With the help of a theoretical model we show that the most intense part of the beam is always the second line foci and that the phase at the focus is strongly saddle-shaped. However, this phase distortion cannot explain the significant interference peak splitting that is experimentally observed in our diffraction patterns. Instead we propose that the beam quality is degraded upon reflection from the multilayer mirror and it is this asymmetric phase distortion that causes the diffraction peak splitting.
Hudec, René
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Mills, B.
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Rogers, E.T.F.
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Grant-Jacob, J.
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Stebbings, S.L.
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Praeger, M.
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de Paula, A.M.
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Froud, C.A.
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Chapman, R.T.
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Butcher, T.J.
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Brocklesby, W.S.
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Frey, J.G.
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Pina, Ladislav
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Hudec, René
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Mills, B.
05f1886e-96ef-420f-b856-4115f4ab36d0
Rogers, E.T.F.
b92cc8ab-0d91-4b2e-b5c7-8a2f490a36a2
Grant-Jacob, J.
c5d144d8-3c43-4195-8e80-edd96bfda91b
Stebbings, S.L.
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Praeger, M.
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de Paula, A.M.
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Froud, C.A.
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Chapman, R.T.
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Butcher, T.J.
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Brocklesby, W.S.
c53ca2f6-db65-4e19-ad00-eebeb2e6de67
Frey, J.G.
ba60c559-c4af-44f1-87e6-ce69819bf23f
Pina, Ladislav
c4d98634-9463-40fb-b169-75b8c2ae13d4

Hudec, René, Mills, B., Rogers, E.T.F., Grant-Jacob, J., Stebbings, S.L., Praeger, M., de Paula, A.M., Froud, C.A., Chapman, R.T., Butcher, T.J., Brocklesby, W.S., Frey, J.G. and Pina, Ladislav (2009) EUV off-axis focusing using a high harmonic source. SPIE Europe Conference on EUV and X-Ray Optics - Synergy between Laboratory and Space/Optics + Optoelectronics Symposium, Czech Republic. 20 - 22 Apr 2009. (doi:10.1117/12.820682).

Record type: Conference or Workshop Item (Paper)

Abstract

High Harmonic Generation is a well established technique for generating Extreme Ultraviolet radiation. It is a promising technique for both structure and spectroscopic imaging due to both the high flux and coherence of the source, and the existence of multiple absorption edges at the generated wavelengths. To increase the flux, a focussing device can be used. Here we present focussing results for a Mo/Si spherical mirror that has been used in an off-axis arrangement, and give extensive analysis of the resulting astigmatic focus and its consequence on diffractive imaging. The astigmatic beam exists as a vertical and horizontal focus, separated by a circle of least confusion. With the help of a theoretical model we show that the most intense part of the beam is always the second line foci and that the phase at the focus is strongly saddle-shaped. However, this phase distortion cannot explain the significant interference peak splitting that is experimentally observed in our diffraction patterns. Instead we propose that the beam quality is degraded upon reflection from the multilayer mirror and it is this asymmetric phase distortion that causes the diffraction peak splitting.

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BEN MILLS - submitted version.docx - Accepted Manuscript
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More information

Published date: April 2009
Venue - Dates: SPIE Europe Conference on EUV and X-Ray Optics - Synergy between Laboratory and Space/Optics + Optoelectronics Symposium, Czech Republic, 2009-04-20 - 2009-04-22
Organisations: Optoelectronics Research Centre, Computational Systems Chemistry

Identifiers

Local EPrints ID: 348769
URI: http://eprints.soton.ac.uk/id/eprint/348769
PURE UUID: d8a22ed0-8123-4511-aa11-3c5c0c325ada
ORCID for B. Mills: ORCID iD orcid.org/0000-0002-1784-1012
ORCID for J. Grant-Jacob: ORCID iD orcid.org/0000-0002-4270-4247
ORCID for W.S. Brocklesby: ORCID iD orcid.org/0000-0002-2123-6712
ORCID for J.G. Frey: ORCID iD orcid.org/0000-0003-0842-4302

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Date deposited: 19 Feb 2013 14:08
Last modified: 17 Dec 2019 02:04

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