Topley, R.P., Martinez-Jimenez, G., O'Faolain, L., Healy, N., Mailis, S., Thomson, D.J., Gardes, F.Y., Peacock, A.C., Payne, D.N.R., Mashanovich, G.Z. and Reed, G.T. (2014) Locally erasable couplers for optical device testing in silicon on insulator. Journal of Lightwave Technology, 32 (12), 2248-2253. (doi:10.1109/JLT.2014.2324018).
Abstract
Wafer scale testing is critical to reducing production costs and increasing production yield. Here we report a method that allows testing of individual optical components within a complex optical integrated circuit. The method is based on diffractive grating couplers, fabricated using lattice damage induced by ion implantation of germanium. These gratings can be erased via localised laser annealing, which is shown to reduce the outcoupling efficiency by over 20 dB after the device testing is completed. Laser annealing was achieved by employing a CW laser, operating at visible wavelengths thus reducing equipment costs and allowing annealing through thick oxide claddings. The process used also retains CMOS compatibility.
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- Faculties (pre 2018 reorg) > Faculty of Physical Sciences and Engineering (pre 2018 reorg) > Electronics & Computer Science (pre 2018 reorg) > Photonic Systems Circuits & Sensors (pre 2018 reorg)
Current Faculties > Faculty of Engineering and Physical Sciences > School of Electronics and Computer Science > Electronics & Computer Science (pre 2018 reorg) > Photonic Systems Circuits & Sensors (pre 2018 reorg)
School of Electronics and Computer Science > Electronics & Computer Science (pre 2018 reorg) > Photonic Systems Circuits & Sensors (pre 2018 reorg) - Faculties (pre 2018 reorg) > Faculty of Physical Sciences and Engineering (pre 2018 reorg) > Optoelectronics Research Centre (pre 2018 reorg)
Current Faculties > Faculty of Engineering and Physical Sciences > Zepler Institute for Photonics and Nanoelectronics > Optoelectronics Research Centre (pre 2018 reorg)
Zepler Institute for Photonics and Nanoelectronics > Optoelectronics Research Centre (pre 2018 reorg)
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