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A sensor for stiffness change sensing based on three weakly coupled resonators with enhanced sensitivity

A sensor for stiffness change sensing based on three weakly coupled resonators with enhanced sensitivity
A sensor for stiffness change sensing based on three weakly coupled resonators with enhanced sensitivity
This paper reports on a novel MEMS resonant sensing device consisting of three weakly coupled resonators that can achieve an order of magnitude improvement in sensitivity to stiffness change, compared to current state-of-the-art resonator sensors with similar size and resonant frequency. In a 3 degree-of-freedom (DoF) system, if an external stimulus causes change in the spring stiffness of one resonator, mode localization occurs, leading to a drastic change of mode shape, which can be detected by measuring the modal amplitude ratio change. A 49 times improvement in sensitivity compared to a previously reported 2DoF resonator sensor, and 4 orders of magnitude enhancement compared to a 1DoF resonator sensor has been achieved.
Zhao, Chun
00e81968-02a9-4b1c-8b63-97aa9fbfd4e9
Wood, Graham S.
61de1458-e7f5-4712-925a-a95bb44580ee
Xie, Jianbing
130942fa-d891-40d0-bcb7-5dc548c56310
Chang, Honglong
5e79fc38-b84c-4e7b-aabe-dae9815cf324
Pu, Suan-Hui
8b46b970-56fd-4a4e-8688-28668f648f43
Chong, Harold M.H.
795aa67f-29e5-480f-b1bc-9bd5c0d558e1
Kraft, Michael
54927621-738f-4d40-af56-a027f686b59f
Zhao, Chun
00e81968-02a9-4b1c-8b63-97aa9fbfd4e9
Wood, Graham S.
61de1458-e7f5-4712-925a-a95bb44580ee
Xie, Jianbing
130942fa-d891-40d0-bcb7-5dc548c56310
Chang, Honglong
5e79fc38-b84c-4e7b-aabe-dae9815cf324
Pu, Suan-Hui
8b46b970-56fd-4a4e-8688-28668f648f43
Chong, Harold M.H.
795aa67f-29e5-480f-b1bc-9bd5c0d558e1
Kraft, Michael
54927621-738f-4d40-af56-a027f686b59f

Zhao, Chun, Wood, Graham S., Xie, Jianbing, Chang, Honglong, Pu, Suan-Hui, Chong, Harold M.H. and Kraft, Michael (2015) A sensor for stiffness change sensing based on three weakly coupled resonators with enhanced sensitivity. 28th IEEE MEMS Conference, Estoril, Portugal. 18 - 22 Jan 2015. 5 pp .

Record type: Conference or Workshop Item (Paper)

Abstract

This paper reports on a novel MEMS resonant sensing device consisting of three weakly coupled resonators that can achieve an order of magnitude improvement in sensitivity to stiffness change, compared to current state-of-the-art resonator sensors with similar size and resonant frequency. In a 3 degree-of-freedom (DoF) system, if an external stimulus causes change in the spring stiffness of one resonator, mode localization occurs, leading to a drastic change of mode shape, which can be detected by measuring the modal amplitude ratio change. A 49 times improvement in sensitivity compared to a previously reported 2DoF resonator sensor, and 4 orders of magnitude enhancement compared to a 1DoF resonator sensor has been achieved.

Text
MEMS15Manuscript.pdf - Accepted Manuscript
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More information

Published date: January 2015
Venue - Dates: 28th IEEE MEMS Conference, Estoril, Portugal, 2015-01-18 - 2015-01-22
Organisations: Nanoelectronics and Nanotechnology, Engineering Science Unit

Identifiers

Local EPrints ID: 371920
URI: http://eprints.soton.ac.uk/id/eprint/371920
PURE UUID: 43dafdb8-5209-4e6e-86d2-7b2dbc0cbcd6
ORCID for Suan-Hui Pu: ORCID iD orcid.org/0000-0002-3335-8880
ORCID for Harold M.H. Chong: ORCID iD orcid.org/0000-0002-7110-5761

Catalogue record

Date deposited: 24 Nov 2014 13:19
Last modified: 21 Nov 2021 03:26

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Contributors

Author: Chun Zhao
Author: Graham S. Wood
Author: Jianbing Xie
Author: Honglong Chang
Author: Suan-Hui Pu ORCID iD
Author: Harold M.H. Chong ORCID iD
Author: Michael Kraft

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