Design and fabrication of indium phosphide air-bridge waveguides with MEMS functionality
Design and fabrication of indium phosphide air-bridge waveguides with MEMS functionality
Data used in publication:
Wing H. Ng, Nina Podoliak, Peter Horak, Jiang Wu, Huiyun Liu, William J. Stewart, and Anthony J. Kenyon,
"Design and fabrication of indium phosphide air-bridge waveguides with MEMS functionality"
Submitted to SPIE Microtechnologies conference, 4-6 May 2015, Barcelona, Spain
University of Southampton
Ng, Wing H.
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Podoliak, Nina
0908b951-00a7-48a5-bc82-631640910b9c
Horak, Peter
520489b5-ccc7-4d29-bb30-c1e36436ea03
Wu, Jiang
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Liu, Huiyun
ed01636f-0728-4d76-87ee-08b93635b2aa
Stewart, Will
bbe93aab-9477-4f08-9042-a0c453aeb7a5
Kenyon, Anthony J.
1e816a53-7f8f-4a52-b140-46d7431c64af
Ng, Wing H.
0cae4e04-109c-48ea-96d2-1600f0710b66
Podoliak, Nina
0908b951-00a7-48a5-bc82-631640910b9c
Horak, Peter
520489b5-ccc7-4d29-bb30-c1e36436ea03
Wu, Jiang
3102d4d7-4bf1-43a6-ac40-acbf798360b6
Liu, Huiyun
ed01636f-0728-4d76-87ee-08b93635b2aa
Stewart, Will
bbe93aab-9477-4f08-9042-a0c453aeb7a5
Kenyon, Anthony J.
1e816a53-7f8f-4a52-b140-46d7431c64af
Ng, Wing H., Podoliak, Nina, Horak, Peter, Wu, Jiang, Liu, Huiyun, Stewart, Will and Kenyon, Anthony J.
(2015)
Design and fabrication of indium phosphide air-bridge waveguides with MEMS functionality.
University of Southampton
doi:10.5258/SOTON/375764
[Dataset]
Abstract
Data used in publication:
Wing H. Ng, Nina Podoliak, Peter Horak, Jiang Wu, Huiyun Liu, William J. Stewart, and Anthony J. Kenyon,
"Design and fabrication of indium phosphide air-bridge waveguides with MEMS functionality"
Submitted to SPIE Microtechnologies conference, 4-6 May 2015, Barcelona, Spain
Archive
SPIE_20Microtechnologies_data.zip
- Dataset
More information
Published date: 2015
Organisations:
Optoelectronics Research Centre
Identifiers
Local EPrints ID: 375764
URI: http://eprints.soton.ac.uk/id/eprint/375764
PURE UUID: bb141563-d46b-4d4d-8c74-559e35c2058c
Catalogue record
Date deposited: 13 Apr 2015 11:25
Last modified: 27 Feb 2024 02:47
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Contributors
Creator:
Wing H. Ng
Creator:
Nina Podoliak
Creator:
Peter Horak
Creator:
Jiang Wu
Creator:
Huiyun Liu
Creator:
Will Stewart
Creator:
Anthony J. Kenyon
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