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Hot-wall chemical vapour deposition (CVD) process for germanium sulphide glass waveguides fabrication

Hot-wall chemical vapour deposition (CVD) process for germanium sulphide glass waveguides fabrication
Hot-wall chemical vapour deposition (CVD) process for germanium sulphide glass waveguides fabrication
The conventional method of fabricating a chalcogenide glass involves melting in a sealed ampoule. The glass then further processed to form, for example, thin films, optical fibre and optoelectronic devices. Thin films of chalcogenide glass can also be deposited by a number of methods including evaporation, sputtering, and ablation.
These techniques in general suffer from difficulties associated with the incorporation of impurities or non-stoichiometry, which degrade the optical properties of the glass. Chemical vapor deposition (CVD) process for the fabrication of chalcogenide materials have been reported with unsatisfactory process and unstable film quality.
Huang, Chung-Che
825f7447-6d02-48f6-b95a-fa33da71f106
Hewak, Daniel
87c80070-c101-4f7a-914f-4cc3131e3db0
Huang, Chung-Che
825f7447-6d02-48f6-b95a-fa33da71f106
Hewak, Daniel
87c80070-c101-4f7a-914f-4cc3131e3db0

Huang, Chung-Che and Hewak, Daniel (2005) Hot-wall chemical vapour deposition (CVD) process for germanium sulphide glass waveguides fabrication. Glamor 2005. 11 - 13 Apr 2005. 1 pp .

Record type: Conference or Workshop Item (Paper)

Abstract

The conventional method of fabricating a chalcogenide glass involves melting in a sealed ampoule. The glass then further processed to form, for example, thin films, optical fibre and optoelectronic devices. Thin films of chalcogenide glass can also be deposited by a number of methods including evaporation, sputtering, and ablation.
These techniques in general suffer from difficulties associated with the incorporation of impurities or non-stoichiometry, which degrade the optical properties of the glass. Chemical vapor deposition (CVD) process for the fabrication of chalcogenide materials have been reported with unsatisfactory process and unstable film quality.

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More information

Published date: 2005
Venue - Dates: Glamor 2005, 2005-04-11 - 2005-04-13
Organisations: Optoelectronics Research Centre

Identifiers

Local EPrints ID: 38298
URI: https://eprints.soton.ac.uk/id/eprint/38298
PURE UUID: aae6f11b-29d2-45d8-9b48-c577149e0994
ORCID for Chung-Che Huang: ORCID iD orcid.org/0000-0003-3471-2463
ORCID for Daniel Hewak: ORCID iD orcid.org/0000-0002-2093-5773

Catalogue record

Date deposited: 12 Jun 2006
Last modified: 06 Jun 2018 13:08

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